Abstract
The epitaxial layers of semiconducting gallium compounds were grown by atmospheric pressure metallorganic chemical vapor deposition (MOCVD). Semiconducting gallium compounds were used to fabricate high electron mobility transistor (HEMT) on semi-insulating silicon carbide substrates. A maximum current density of 867 mA/mm and transconductance of 287 mS/mm was observed for the gate voltage of 0.2 volts.
Original language | English |
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Pages | 91-92 |
Number of pages | 2 |
Publication status | Published - 2001 Jan 1 |
Externally published | Yes |
Event | Device Research Conference (DRC) - Notre Dame, IN, United States Duration: 2001 Jun 25 → 2001 Jun 27 |
Conference
Conference | Device Research Conference (DRC) |
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Country/Territory | United States |
City | Notre Dame, IN |
Period | 01/6/25 → 01/6/27 |
ASJC Scopus subject areas
- Engineering(all)