Abstract
In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.
| Original language | English |
|---|---|
| Article number | 5431054 |
| Pages (from-to) | 350-356 |
| Number of pages | 7 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 19 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2010 Apr |
| Externally published | Yes |
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Keywords
- Filters
- Magnetic forces
- Microactuators
- Photolithography
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Fabrication and application of 3-D magnetically driven microtools. / Yamanishi, Yoko; Sakuma, Shinya; Kihara, Yuki; Arai, Fumihito.
In: Journal of Microelectromechanical Systems, Vol. 19, No. 2, 5431054, 04.2010, p. 350-356.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication and application of 3-D magnetically driven microtools
AU - Yamanishi, Yoko
AU - Sakuma, Shinya
AU - Kihara, Yuki
AU - Arai, Fumihito
PY - 2010/4
Y1 - 2010/4
N2 - In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.
AB - In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.
KW - Filters
KW - Magnetic forces
KW - Microactuators
KW - Photolithography
UR - http://www.scopus.com/inward/record.url?scp=77950586633&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77950586633&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2010.2041188
DO - 10.1109/JMEMS.2010.2041188
M3 - Article
VL - 19
SP - 350
EP - 356
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 2
M1 - 5431054
ER -