Fabrication and application of 3-D magnetically driven microtools

Yoko Yamanishi, Shinya Sakuma, Yuki Kihara, Fumihito Arai

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.

Original languageEnglish
Article number5431054
Pages (from-to)350-356
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume19
Issue number2
DOIs
Publication statusPublished - 2010 Apr
Externally publishedYes

Fingerprint

Photolithography
Fabrication
Microactuators
Axial flow
Fluidics
Photoresists
Masks
Contamination
Finite element method
Polymers
Experiments
Ultraviolet Rays

Keywords

  • Filters
  • Magnetic forces
  • Microactuators
  • Photolithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Fabrication and application of 3-D magnetically driven microtools. / Yamanishi, Yoko; Sakuma, Shinya; Kihara, Yuki; Arai, Fumihito.

In: Journal of Microelectromechanical Systems, Vol. 19, No. 2, 5431054, 04.2010, p. 350-356.

Research output: Contribution to journalArticle

Yamanishi, Yoko ; Sakuma, Shinya ; Kihara, Yuki ; Arai, Fumihito. / Fabrication and application of 3-D magnetically driven microtools. In: Journal of Microelectromechanical Systems. 2010 ; Vol. 19, No. 2. pp. 350-356.
@article{666622b1e82a4d6da26f35efdccb8899,
title = "Fabrication and application of 3-D magnetically driven microtools",
abstract = "In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.",
keywords = "Filters, Magnetic forces, Microactuators, Photolithography",
author = "Yoko Yamanishi and Shinya Sakuma and Yuki Kihara and Fumihito Arai",
year = "2010",
month = "4",
doi = "10.1109/JMEMS.2010.2041188",
language = "English",
volume = "19",
pages = "350--356",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - Fabrication and application of 3-D magnetically driven microtools

AU - Yamanishi, Yoko

AU - Sakuma, Shinya

AU - Kihara, Yuki

AU - Arai, Fumihito

PY - 2010/4

Y1 - 2010/4

N2 - In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.

AB - In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-μm gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-D MMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells.

KW - Filters

KW - Magnetic forces

KW - Microactuators

KW - Photolithography

UR - http://www.scopus.com/inward/record.url?scp=77950586633&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950586633&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2010.2041188

DO - 10.1109/JMEMS.2010.2041188

M3 - Article

VL - 19

SP - 350

EP - 356

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 2

M1 - 5431054

ER -