Fabrication and characterization of anatase/rutile-TiO2 thin films by magnetron sputtering: A review

Sakae Tanemura, Lei Miao, Wilfried Wunderlich, Masaki Tanemura, Yukimasa Mori, Shoichi Toh, Kenji Kaneko

Research output: Contribution to journalReview articlepeer-review

85 Citations (Scopus)


This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films.

Original languageEnglish
Pages (from-to)11-17
Number of pages7
JournalScience and Technology of Advanced Materials
Issue number1
Publication statusPublished - 2005 Jan
Externally publishedYes


  • Bactericidal ability
  • Epitaxial growth
  • Helicon RF magnetron sputtering
  • Optical properties
  • Surface treatment
  • TiO thin film

ASJC Scopus subject areas

  • Materials Science(all)


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