Fabrication and characterization of anatase/rutile-TiO2 thin films by magnetron sputtering: A review

Sakae Tanemura, Lei Miao, Wilfried Wunderlich, Masaki Tanemura, Yukimasa Mori, Shoichi Toh, Kenji Kaneko

Research output: Contribution to journalReview articlepeer-review

81 Citations (Scopus)

Fingerprint Dive into the research topics of 'Fabrication and characterization of anatase/rutile-TiO<sub>2</sub> thin films by magnetron sputtering: A review'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds