Fabrication and characterization of GaP photonic crystals for terahertz wave application

Kyosuke Saito; Kei Nozawa; Tadao Tanabe; Yutaka Oyama; Ken Suto; Jun Ichi Nishizawa; Tetsuo Sasaki; Tomoyuki Kimura

doi:10.2320/matertrans.MAW200728

Fabrication and characterization of GaP photonic crystals for terahertz wave application

Kyosuke Saito, Kei Nozawa, Tadao Tanabe, Yutaka Oyama, Ken Suto, Jun Ichi Nishizawa, Tetsuo Sasaki, Tomoyuki Kimura

Research output: Contribution to journal › Article › peer-review

Abstract

We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl ₂ gas chemistries. We performed 75-μm-deep etching of GaP, in which Al ₂O ₃ layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

Original language	English
Pages (from-to)	2340-2342
Number of pages	3
Journal	Materials Transactions
Volume	48
Issue number	9
DOIs	https://doi.org/10.2320/matertrans.MAW200728
Publication status	Published - 2007 Sept
Externally published	Yes

Keywords

Collinear phase matching
GaP
Optical waveguide
Phonon-polariton
Photonic crystal
Terahertz-wave

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.2320/matertrans.MAW200728

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title = "Fabrication and characterization of GaP photonic crystals for terahertz wave application",

abstract = "We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl 2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al 2O 3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.",

keywords = "Collinear phase matching, GaP, Optical waveguide, Phonon-polariton, Photonic crystal, Terahertz-wave",

author = "Kyosuke Saito and Kei Nozawa and Tadao Tanabe and Yutaka Oyama and Ken Suto and Nishizawa, {Jun Ichi} and Tetsuo Sasaki and Tomoyuki Kimura",

year = "2007",

month = sep,

doi = "10.2320/matertrans.MAW200728",

language = "English",

volume = "48",

pages = "2340--2342",

journal = "Materials Transactions",

issn = "1345-9678",

publisher = "Japan Institute of Metals (JIM)",

number = "9",

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TY - JOUR

T1 - Fabrication and characterization of GaP photonic crystals for terahertz wave application

AU - Saito, Kyosuke

AU - Nozawa, Kei

AU - Tanabe, Tadao

AU - Oyama, Yutaka

AU - Suto, Ken

AU - Nishizawa, Jun Ichi

AU - Sasaki, Tetsuo

AU - Kimura, Tomoyuki

PY - 2007/9

Y1 - 2007/9

N2 - We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl 2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al 2O 3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

AB - We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl 2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al 2O 3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

KW - Collinear phase matching

KW - GaP

KW - Optical waveguide

KW - Phonon-polariton

KW - Photonic crystal

KW - Terahertz-wave

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DO - 10.2320/matertrans.MAW200728

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SP - 2340

EP - 2342

JO - Materials Transactions

JF - Materials Transactions

IS - 9

ER -

Fabrication and characterization of GaP photonic crystals for terahertz wave application

Abstract

Keywords

ASJC Scopus subject areas

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