Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering

S. Tanemura, S. Koide, Y. Senzaki, L. Miao, H. Hirai, Y. Mori, P. Jin, K. Kaneko, A. Terai, N. Nabatova-Gabain

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

SmS thin films have been individually fabricated on either a-SiO/Si or NaCl substrates at a room temperature by dual targets (dc for metal Sm and rf for pressed powdered chalcogenide Sm 2 S 3 ) magnetron sputtering of concurrent power control. The fabricated films were characterized by transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and spectroscopic ellipsometry (SE), respectively, to identify phase formation, structure, and optical band gap. The followings are summarized: (1) polycrystalline metal, intermedium, or semiconductor SmS thin films were identified by XRD, TEM and the phase formation was achieved by controlling the ratio of dc to rf power; (2) the obtained lattice constant of intermedium phase was 5.85 Å from electron diffraction (ED) and 5.91 Å from lattice image. The former value is contraction by 2% compared with bulk semiconductor (5.97 Å), while the later one is contraction by 1% compared with semiconducting one, although this being probably semiconductor which is suggested by the dominated Sm 2+ valence state in Sm 3d of XPS; (3) XPS depth profile result confirm that metal Sm and samarium oxide exist near the film-substrate boundary in intermedium case, while stoichiometric SmS is dominant at the surface layer; (4) in semiconductor case, optical band gap is 2.67eV obtained by Tauc plot from SE results.

Original languageEnglish
Pages (from-to)279-286
Number of pages8
JournalApplied Surface Science
Volume212-213
Issue numberSPEC.
DOIs
Publication statusPublished - 2003 May 15
Externally publishedYes

Keywords

  • Dual magnetron sputtering
  • Optical band gap
  • SmS thin films
  • TEM
  • XPS
  • XRD

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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  • Cite this

    Tanemura, S., Koide, S., Senzaki, Y., Miao, L., Hirai, H., Mori, Y., Jin, P., Kaneko, K., Terai, A., & Nabatova-Gabain, N. (2003). Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering. Applied Surface Science, 212-213(SPEC.), 279-286. https://doi.org/10.1016/S0169-4332(03)00113-2