Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls

M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages144-145
Number of pages2
Publication statusPublished - 2004 Dec 1
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 2004 Oct 262004 Oct 29

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period04/10/2604/10/29

ASJC Scopus subject areas

  • Engineering(all)

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    Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2004). Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 144-145). (Digest of Papers - Microprocesses and Nanotechnology 2004).