Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls

Masayuki Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages144-145
Number of pages2
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka
Duration: 2004 Oct 262004 Oct 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
CityOsaka
Period04/10/2604/10/29

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Electron beams
Fabrication
Electron microscopes
Metals
Field emission
Spectrometers
Nanostructures
Energy dissipation
Deposits
Heat treatment
Iron
Scanning
Scanning electron microscopy
Electrons
Electric potential
Chemical analysis
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2004). Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 144-145)

Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. / Shimojo, Masayuki; Takeguchi, M.; Mitsuishi, K.; Tanaka, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 144-145.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shimojo, M, Takeguchi, M, Mitsuishi, K, Tanaka, M & Furuya, K 2004, Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. in Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 144-145, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K. Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. In Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 144-145
Shimojo, Masayuki ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 144-145
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