Fabrication and direct transmission measurement of high-aspect-ratio two-dimensional silicon-based photonic crystal chips

Mathematics

• Photonic Band Gap 100%
• Photonic Crystal 81%
• Silicon 70%
• Fabrication 69%
• Chip 63%
• Aspect Ratio 62%
• Electron Beam Lithography 50%
• Etching 39%
• Crystal Structure 34%
• Thinning 32%
• Semiconductors 29%
• Experimental Results 24%
• Numerical Results 16%
• Demonstrate 15%
• Standards 13%
• Characterization 13%

Physics & Astronomy

• high aspect ratio 53%
• chips 39%
• photonics 34%
• fabrication 30%
• silicon 26%
• crystals 24%
• rods 20%
• lithography 10%
• crystal structure 9%
• etching 9%
• electron beams 8%
• air 7%
• characterization 6%