Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects

M.Takagi M.Takagi, T. Wakui, Y. Karasawa, S. Kuwahara, N. Sakuma, A. Kajita, T. Sakai, K. Ueno

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	134-135
Journal	Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session
Publication status	Published - 2011 Sep 14

@article{d80e0d347652443f94cd46d39fa931cd,

title = "Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects",

author = "M.Takagi M.Takagi and T. Wakui and Y. Karasawa and S. Kuwahara and N. Sakuma and A. Kajita and T. Sakai and K. Ueno",

year = "2011",

month = "9",

day = "14",

language = "English",

pages = "134--135",

journal = "Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session",

}

TY - JOUR

T1 - Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects

AU - M.Takagi, M.Takagi

AU - Wakui, T.

AU - Karasawa, Y.

AU - Kuwahara, S.

AU - Sakuma, N.

AU - Kajita, A.

AU - Sakai, T.

AU - Ueno, K.

PY - 2011/9/14

Y1 - 2011/9/14

M3 - Article

SP - 134

EP - 135

JO - Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session

JF - Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session

ER -