Original language | English |
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Pages (from-to) | 134-135 |
Journal | Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session |
Publication status | Published - 2011 Sep 14 |
Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects
M.Takagi M.Takagi, T. Wakui, Y. Karasawa, S. Kuwahara, N. Sakuma, A. Kajita, T. Sakai, K. Ueno
Research output: Contribution to journal › Article › peer-review