Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects

M.Takagi M.Takagi, T. Wakui, Y. Karasawa, S. Kuwahara, N. Sakuma, A. Kajita, T. Sakai, K. Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)134-135
JournalEntended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session
Publication statusPublished - 2011 Sep 14

Cite this

Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects. / M.Takagi, M.Takagi; Wakui, T.; Karasawa, Y.; Kuwahara, S.; Sakuma, N.; Kajita, A.; Sakai, T.; Ueno, K.

In: Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session, 14.09.2011, p. 134-135.

Research output: Contribution to journalArticle

M.Takagi, M.Takagi ; Wakui, T. ; Karasawa, Y. ; Kuwahara, S. ; Sakuma, N. ; Kajita, A. ; Sakai, T. ; Ueno, K. / Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects. In: Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session. 2011 ; pp. 134-135.
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