Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Contribution to journalArticle

Original languageEnglish
Journal34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)
Publication statusPublished - 2008 Sep 1

Cite this

Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing. / Furuta, Y.; Nishikawa, H.; Satoh, T.; Ishii, Y.; Kamiya, T.; Nakao, R.; Uchida, S.

In: 34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece), 01.09.2008.

Research output: Contribution to journalArticle

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AU - Kamiya, T.

AU - Nakao, R.

AU - Uchida, S.

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