Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Contribution to journalArticle

Original languageEnglish
Journal34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)
Publication statusPublished - 2008 Sep 1

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