Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)
Publication status	Published - 2008 Sept 1

Cite this

@article{9f30200f6b584551ae07c173b633459e,

title = "Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing",

author = "Y. Furuta and H. Nishikawa and T. Satoh and Y. Ishii and T. Kamiya and R. Nakao and S. Uchida",

year = "2008",

month = sep,

day = "1",

language = "English",

journal = "34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)",

}

TY - JOUR

T1 - Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

AU - Furuta, Y.

AU - Nishikawa, H.

AU - Satoh, T.

AU - Ishii, Y.

AU - Kamiya, T.

AU - Nakao, R.

AU - Uchida, S.

PY - 2008/9/1

Y1 - 2008/9/1

M3 - Article

JO - 34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)

JF - 34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)

ER -