Fabrication and evaluation of 3D-electric micro filters using proton beam writing

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Dielectrophoresis (DEP) is a phenomenon involving translational movement of a polarizable object toward the direction of the electric field gradient. DEP has been used for electrical trapping of food poisoning microbes such as Escherichia coli (E. coli). In this paper, we developed 3D-electric micro filters equipped with high-aspect-ratio pillar array with a height of ∼15 μm and a diameter of ∼1 μm as a part of the electric micro filter. The pillar array was fabricated using a 15 micrometer thick negative resist layer on silica substrate by proton beam writing (PBW). We analyzed a DEP force distribution around pillars in the 3D-electric micro filters. Making the most of superior features of PBW as a rapid prototyping tool, we evaluate the performance of the DEP device for trapping capability of E. coli by photoluminescence (PL) measurement for various arrangements of the pillars to achieve higher trapping efficiency of the 3D-electric micro filter.

Original languageEnglish
Pages (from-to)1396-1400
Number of pages5
JournalMicroelectronic Engineering
Volume86
Issue number4-6
DOIs
Publication statusPublished - 2009 Apr

Fingerprint

Proton beams
Electrophoresis
proton beams
filters
Fabrication
fabrication
evaluation
trapping
Escherichia
Escherichia coli
force distribution
rapid prototyping
poisoning
Rapid prototyping
microorganisms
high aspect ratio
food
Silicon Dioxide
micrometers
Aspect ratio

Keywords

  • DEP
  • Electric micro filter
  • High-aspect-ratio pillar array
  • PBW
  • SU-8

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

Fabrication and evaluation of 3D-electric micro filters using proton beam writing. / Furuta, Yusuke; Nishikawa, Hiroyuki; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Nakao, Ryota; Uchida, Satoshi.

In: Microelectronic Engineering, Vol. 86, No. 4-6, 04.2009, p. 1396-1400.

Research output: Contribution to journalArticle

Furuta, Yusuke ; Nishikawa, Hiroyuki ; Satoh, Takahiro ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Nakao, Ryota ; Uchida, Satoshi. / Fabrication and evaluation of 3D-electric micro filters using proton beam writing. In: Microelectronic Engineering. 2009 ; Vol. 86, No. 4-6. pp. 1396-1400.
@article{c6e9a4934dd747fa804d00febe8db4d4,
title = "Fabrication and evaluation of 3D-electric micro filters using proton beam writing",
abstract = "Dielectrophoresis (DEP) is a phenomenon involving translational movement of a polarizable object toward the direction of the electric field gradient. DEP has been used for electrical trapping of food poisoning microbes such as Escherichia coli (E. coli). In this paper, we developed 3D-electric micro filters equipped with high-aspect-ratio pillar array with a height of ∼15 μm and a diameter of ∼1 μm as a part of the electric micro filter. The pillar array was fabricated using a 15 micrometer thick negative resist layer on silica substrate by proton beam writing (PBW). We analyzed a DEP force distribution around pillars in the 3D-electric micro filters. Making the most of superior features of PBW as a rapid prototyping tool, we evaluate the performance of the DEP device for trapping capability of E. coli by photoluminescence (PL) measurement for various arrangements of the pillars to achieve higher trapping efficiency of the 3D-electric micro filter.",
keywords = "DEP, Electric micro filter, High-aspect-ratio pillar array, PBW, SU-8",
author = "Yusuke Furuta and Hiroyuki Nishikawa and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Ryota Nakao and Satoshi Uchida",
year = "2009",
month = "4",
doi = "10.1016/j.mee.2008.12.065",
language = "English",
volume = "86",
pages = "1396--1400",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "4-6",

}

TY - JOUR

T1 - Fabrication and evaluation of 3D-electric micro filters using proton beam writing

AU - Furuta, Yusuke

AU - Nishikawa, Hiroyuki

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Nakao, Ryota

AU - Uchida, Satoshi

PY - 2009/4

Y1 - 2009/4

N2 - Dielectrophoresis (DEP) is a phenomenon involving translational movement of a polarizable object toward the direction of the electric field gradient. DEP has been used for electrical trapping of food poisoning microbes such as Escherichia coli (E. coli). In this paper, we developed 3D-electric micro filters equipped with high-aspect-ratio pillar array with a height of ∼15 μm and a diameter of ∼1 μm as a part of the electric micro filter. The pillar array was fabricated using a 15 micrometer thick negative resist layer on silica substrate by proton beam writing (PBW). We analyzed a DEP force distribution around pillars in the 3D-electric micro filters. Making the most of superior features of PBW as a rapid prototyping tool, we evaluate the performance of the DEP device for trapping capability of E. coli by photoluminescence (PL) measurement for various arrangements of the pillars to achieve higher trapping efficiency of the 3D-electric micro filter.

AB - Dielectrophoresis (DEP) is a phenomenon involving translational movement of a polarizable object toward the direction of the electric field gradient. DEP has been used for electrical trapping of food poisoning microbes such as Escherichia coli (E. coli). In this paper, we developed 3D-electric micro filters equipped with high-aspect-ratio pillar array with a height of ∼15 μm and a diameter of ∼1 μm as a part of the electric micro filter. The pillar array was fabricated using a 15 micrometer thick negative resist layer on silica substrate by proton beam writing (PBW). We analyzed a DEP force distribution around pillars in the 3D-electric micro filters. Making the most of superior features of PBW as a rapid prototyping tool, we evaluate the performance of the DEP device for trapping capability of E. coli by photoluminescence (PL) measurement for various arrangements of the pillars to achieve higher trapping efficiency of the 3D-electric micro filter.

KW - DEP

KW - Electric micro filter

KW - High-aspect-ratio pillar array

KW - PBW

KW - SU-8

UR - http://www.scopus.com/inward/record.url?scp=67349256854&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=67349256854&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2008.12.065

DO - 10.1016/j.mee.2008.12.065

M3 - Article

VL - 86

SP - 1396

EP - 1400

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 4-6

ER -