Original language | English |
---|---|
Journal | The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007) |
Publication status | Published - 2007 May 29 |
Fabrication of 3-D Structures of Resist byProton Beam Writing
Y. Furuta, N. Uchiya, H. Nishikawa, J. Haga, T. Satoh, M. Oikawa, Y. Ishii, T. Kamiya
Research output: Contribution to journal › Article › peer-review