Fabrication of 3-D Structures of Resist byProton Beam Writing

Y. Furuta, N. Uchiya, H. Nishikawa, J. Haga, T. Satoh, M. Oikawa, Y. Ishii, T. Kamiya

Research output: Contribution to journalArticle

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Fabrication of 3-D Structures of Resist byProton Beam Writing. / Furuta, Y.; Uchiya, N.; Nishikawa, H.; Haga, J.; Satoh, T.; Oikawa, M.; Ishii, Y.; Kamiya, T.

In: The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007), 29.05.2007.

Research output: Contribution to journalArticle

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title = "Fabrication of 3-D Structures of Resist byProton Beam Writing",
author = "Y. Furuta and N. Uchiya and H. Nishikawa and J. Haga and T. Satoh and M. Oikawa and Y. Ishii and T. Kamiya",
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AU - Uchiya, N.

AU - Nishikawa, H.

AU - Haga, J.

AU - Satoh, T.

AU - Oikawa, M.

AU - Ishii, Y.

AU - Kamiya, T.

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