| Original language | English |
|---|---|
| Journal | The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007) |
| Publication status | Published - 2007 May 29 |
Cite this
Furuta, Y., Uchiya, N., Nishikawa, H., Haga, J., Satoh, T., Oikawa, M., ... Kamiya, T. (2007). Fabrication of 3-D Structures of Resist byProton Beam Writing. The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007).
Fabrication of 3-D Structures of Resist byProton Beam Writing. / Furuta, Y.; Uchiya, N.; Nishikawa, H.; Haga, J.; Satoh, T.; Oikawa, M.; Ishii, Y.; Kamiya, T.
In: The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007), 29.05.2007.Research output: Contribution to journal › Article
Furuta, Y, Uchiya, N, Nishikawa, H, Haga, J, Satoh, T, Oikawa, M, Ishii, Y & Kamiya, T 2007, 'Fabrication of 3-D Structures of Resist byProton Beam Writing', The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007).
Furuta Y, Uchiya N, Nishikawa H, Haga J, Satoh T, Oikawa M et al. Fabrication of 3-D Structures of Resist byProton Beam Writing. The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007). 2007 May 29.
@article{b6d7e224e51943b7aacc04492bccaa40,
title = "Fabrication of 3-D Structures of Resist byProton Beam Writing",
author = "Y. Furuta and N. Uchiya and H. Nishikawa and J. Haga and T. Satoh and M. Oikawa and Y. Ishii and T. Kamiya",
year = "2007",
month = "5",
day = "29",
language = "English",
journal = "The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)",
}
TY - JOUR
T1 - Fabrication of 3-D Structures of Resist byProton Beam Writing
AU - Furuta, Y.
AU - Uchiya, N.
AU - Nishikawa, H.
AU - Haga, J.
AU - Satoh, T.
AU - Oikawa, M.
AU - Ishii, Y.
AU - Kamiya, T.
PY - 2007/5/29
Y1 - 2007/5/29
M3 - Article
JO - The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)
JF - The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)
ER -