Fabrication of 3-D Structures of Resist byProton Beam Writing

Y. Furuta, N. Uchiya, H. Nishikawa, J. Haga, T. Satoh, M. Oikawa, Y. Ishii, T. Kamiya

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)
Publication status	Published - 2007 May 29

Cite this

@article{b6d7e224e51943b7aacc04492bccaa40,

title = "Fabrication of 3-D Structures of Resist byProton Beam Writing",

author = "Y. Furuta and N. Uchiya and H. Nishikawa and J. Haga and T. Satoh and M. Oikawa and Y. Ishii and T. Kamiya",

year = "2007",

month = may,

day = "29",

language = "English",

journal = "The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)",

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TY - JOUR

T1 - Fabrication of 3-D Structures of Resist byProton Beam Writing

AU - Furuta, Y.

AU - Uchiya, N.

AU - Nishikawa, H.

AU - Haga, J.

AU - Satoh, T.

AU - Oikawa, M.

AU - Ishii, Y.

AU - Kamiya, T.

PY - 2007/5/29

Y1 - 2007/5/29

M3 - Article

JO - The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)

JF - The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007)

ER -