Fabrication of alpha-iron and iron carbide nanostructures by electron-beam induced chemical vapor deposition and postdeposition heat treatment

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.

Original languageEnglish
Pages (from-to)5631-5634
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number7 B
DOIs
Publication statusPublished - 2005 Jul 26
Externally publishedYes

Fingerprint

carbides
Carbides
Chemical vapor deposition
Electron beams
Nanostructures
heat treatment
Heat treatment
vapor deposition
electron beams
Iron
iron
Fabrication
fabrication
Crystalline materials
Carbon
Electron energy loss spectroscopy
carbon
Nanorods
Iron oxides
iron oxides

Keywords

  • Alpha-iron
  • Electron energy loss spectroscopy
  • Electron-beam-induced chemical vapor deposition
  • Nanostructure
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

@article{c5313a2b5f9d4ab4b4977e57d376604b,
title = "Fabrication of alpha-iron and iron carbide nanostructures by electron-beam induced chemical vapor deposition and postdeposition heat treatment",
abstract = "We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.",
keywords = "Alpha-iron, Electron energy loss spectroscopy, Electron-beam-induced chemical vapor deposition, Nanostructure, Transmission electron microscopy",
author = "Masaki Takeguchi and Masayuki Shimojo and Kazuo Furuya",
year = "2005",
month = "7",
day = "26",
doi = "10.1143/JJAP.44.5631",
language = "English",
volume = "44",
pages = "5631--5634",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7 B",

}

TY - JOUR

T1 - Fabrication of alpha-iron and iron carbide nanostructures by electron-beam induced chemical vapor deposition and postdeposition heat treatment

AU - Takeguchi, Masaki

AU - Shimojo, Masayuki

AU - Furuya, Kazuo

PY - 2005/7/26

Y1 - 2005/7/26

N2 - We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.

AB - We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.

KW - Alpha-iron

KW - Electron energy loss spectroscopy

KW - Electron-beam-induced chemical vapor deposition

KW - Nanostructure

KW - Transmission electron microscopy

UR - http://www.scopus.com/inward/record.url?scp=31844442420&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31844442420&partnerID=8YFLogxK

U2 - 10.1143/JJAP.44.5631

DO - 10.1143/JJAP.44.5631

M3 - Article

VL - 44

SP - 5631

EP - 5634

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7 B

ER -