Fabrication of alpha-iron and iron carbide nanostructures by electron-beam induced chemical vapor deposition and postdeposition heat treatment

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

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19 Citations (Scopus)


We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.

Original languageEnglish
Pages (from-to)5631-5634
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number7 B
Publication statusPublished - 2005 Jul 26
Externally publishedYes



  • Alpha-iron
  • Electron energy loss spectroscopy
  • Electron-beam-induced chemical vapor deposition
  • Nanostructure
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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