Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing

Masaki Yamaguchi, A. Yamamoto, Y. Masuda

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Ferroelectric Bi4Ti3O12 thin films were prepared on Pt-coated Si wafers by using alcoholic solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 4] in C2H5OC2H4OH. To fabricate films with a single phase of the perovskite structure, we fired the precursor films in an atmosphere with strong oxidizability. The fabricated films exhibited a single perovskite phase and a predominantly c-axis orientation with plate-like grains larger than 4 × 4 μm2 and smooth surface over an extensive area. The leakage current density of the films was of the order of 10-7 A/cm2. Several 1 × 1 cm2 square patterns were directly drawn on a 4-inch Si wafers by inkjet printing (IJP). The minimum dot size realized was approximately 70 μm in diameter. Beside, the force a droplet from printer head was faithfully. However, from the typical thickness profile of the printed line shape patterns, the height at the center of the line was very low while that at the periphery was extremely high. This seems to be due to the surface tension.

Original languageEnglish
Pages (from-to)747-750
Number of pages4
JournalJournal of the Korean Physical Society
Volume51
Issue number2 PART I
Publication statusPublished - 2007 Aug

Fingerprint

printing
fabrication
wafers
printers
line shape
interfacial tension
leakage
current density
atmospheres
thin films
profiles

Keywords

  • Alcoholic solutions
  • Ferroelectric
  • Inkjet printing
  • Thin film

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing. / Yamaguchi, Masaki; Yamamoto, A.; Masuda, Y.

In: Journal of the Korean Physical Society, Vol. 51, No. 2 PART I, 08.2007, p. 747-750.

Research output: Contribution to journalArticle

Yamaguchi, Masaki ; Yamamoto, A. ; Masuda, Y. / Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing. In: Journal of the Korean Physical Society. 2007 ; Vol. 51, No. 2 PART I. pp. 747-750.
@article{b29013d93f024585bebcf3c93dcf0409,
title = "Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing",
abstract = "Ferroelectric Bi4Ti3O12 thin films were prepared on Pt-coated Si wafers by using alcoholic solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 4] in C2H5OC2H4OH. To fabricate films with a single phase of the perovskite structure, we fired the precursor films in an atmosphere with strong oxidizability. The fabricated films exhibited a single perovskite phase and a predominantly c-axis orientation with plate-like grains larger than 4 × 4 μm2 and smooth surface over an extensive area. The leakage current density of the films was of the order of 10-7 A/cm2. Several 1 × 1 cm2 square patterns were directly drawn on a 4-inch Si wafers by inkjet printing (IJP). The minimum dot size realized was approximately 70 μm in diameter. Beside, the force a droplet from printer head was faithfully. However, from the typical thickness profile of the printed line shape patterns, the height at the center of the line was very low while that at the periphery was extremely high. This seems to be due to the surface tension.",
keywords = "Alcoholic solutions, Ferroelectric, Inkjet printing, Thin film",
author = "Masaki Yamaguchi and A. Yamamoto and Y. Masuda",
year = "2007",
month = "8",
language = "English",
volume = "51",
pages = "747--750",
journal = "Journal of the Korean Physical Society",
issn = "0374-4884",
publisher = "Korean Physical Society",
number = "2 PART I",

}

TY - JOUR

T1 - Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing

AU - Yamaguchi, Masaki

AU - Yamamoto, A.

AU - Masuda, Y.

PY - 2007/8

Y1 - 2007/8

N2 - Ferroelectric Bi4Ti3O12 thin films were prepared on Pt-coated Si wafers by using alcoholic solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 4] in C2H5OC2H4OH. To fabricate films with a single phase of the perovskite structure, we fired the precursor films in an atmosphere with strong oxidizability. The fabricated films exhibited a single perovskite phase and a predominantly c-axis orientation with plate-like grains larger than 4 × 4 μm2 and smooth surface over an extensive area. The leakage current density of the films was of the order of 10-7 A/cm2. Several 1 × 1 cm2 square patterns were directly drawn on a 4-inch Si wafers by inkjet printing (IJP). The minimum dot size realized was approximately 70 μm in diameter. Beside, the force a droplet from printer head was faithfully. However, from the typical thickness profile of the printed line shape patterns, the height at the center of the line was very low while that at the periphery was extremely high. This seems to be due to the surface tension.

AB - Ferroelectric Bi4Ti3O12 thin films were prepared on Pt-coated Si wafers by using alcoholic solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 4] in C2H5OC2H4OH. To fabricate films with a single phase of the perovskite structure, we fired the precursor films in an atmosphere with strong oxidizability. The fabricated films exhibited a single perovskite phase and a predominantly c-axis orientation with plate-like grains larger than 4 × 4 μm2 and smooth surface over an extensive area. The leakage current density of the films was of the order of 10-7 A/cm2. Several 1 × 1 cm2 square patterns were directly drawn on a 4-inch Si wafers by inkjet printing (IJP). The minimum dot size realized was approximately 70 μm in diameter. Beside, the force a droplet from printer head was faithfully. However, from the typical thickness profile of the printed line shape patterns, the height at the center of the line was very low while that at the periphery was extremely high. This seems to be due to the surface tension.

KW - Alcoholic solutions

KW - Ferroelectric

KW - Inkjet printing

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=34548361667&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548361667&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:34548361667

VL - 51

SP - 747

EP - 750

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

SN - 0374-4884

IS - 2 PART I

ER -