Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi; Asa Yamamoto; Yoichiro Masuda

doi:10.1109/ISAF.2007.4393190

Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi, Asa Yamamoto, Yoichiro Masuda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricate the bismut titanate (Bi₄Ti₃O ₁₂) thin films used an alcohol related solutions which dissolved Bi(OtC₅H₁₁)₃ and Ti[OCH(CH₃) ₂]₄ in C₂H₅OC₂H ₄OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm² and 36kV/cm, respectively, and shows fatigue properties up to 10⁸ times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	126-129
Number of pages	4
DOIs	https://doi.org/10.1109/ISAF.2007.4393190
Publication status	Published - 2007
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: 2007 May 27 → 2007 May 31

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	07/5/27 → 07/5/31

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/ISAF.2007.4393190

Cite this

Yamaguchi, M., Yamamoto, A., & Masuda, Y. (2007). Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 126-129). [4393190] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393190

Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems. / Yamaguchi, Masaki; Yamamoto, Asa; Masuda, Yoichiro.

2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 126-129 4393190 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamaguchi, M, Yamamoto, A & Masuda, Y 2007, Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393190, IEEE International Symposium on Applications of Ferroelectrics, pp. 126-129, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 07/5/27. https://doi.org/10.1109/ISAF.2007.4393190

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title = "Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems",

abstract = "We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.",

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AB - We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

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