Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi, Asa Yamamoto, Yoichiro Masuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

Original languageEnglish
Title of host publication2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages126-129
Number of pages4
DOIs
Publication statusPublished - 2007
Event2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan
Duration: 2007 May 272007 May 31

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics

Conference

Conference2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
CountryJapan
CityNara-city
Period07/5/2707/5/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Yamaguchi, M., Yamamoto, A., & Masuda, Y. (2007). Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 126-129). [4393190] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393190