Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates

Keisuke Saito, Hidetaka Hayashi, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Polydimethylsiloxane (PDMS), a type of silicone rubber, has excellent material properties such as flexibility, optical transparency and biocompatibility. Therefore, it can offer possible applications in the field of microfluidics as flexible micro-optical components, when they can be formed on transparent materials such as silica glass. We performed proton beam writing (PBW) (with 1.0 MeV beam) on PDMS microstructures with curved surface on silica glass. We found that 13-μm thick PDMS films on silica glass are sensitive only for proton fluences above 600 nC/mm2 in contrast with the sensitivity of 4.0 nC/mm2 when using a silicon substrate. Based on the hypothesis that the effective sensitivity was lower due to the electric charging of silica glass surface during PBW, we coated the silica glass surface by Au sputtering. As a result, we were able to observe the formation of PDMS on the Au-coated silica glass at a much lower fluence of 2.0 nC/mm2. Arrays of curved PDMS structures with a height of 13 μm and diameter of 40 μm have been fabricated on a semi-transparent Au-coated silica glass.

Original languageEnglish
Pages (from-to)284-287
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume306
DOIs
Publication statusPublished - 2013

Fingerprint

Proton beams
silica glass
Polydimethylsiloxane
Fused silica
proton beams
Lenses
lenses
Fabrication
microstructure
Microstructure
fabrication
Substrates
fluence
silicone rubber
transparence
curved surfaces
sensitivity
biocompatibility
Biocompatibility
Microfluidics

Keywords

  • Micro-lens arrays
  • Micro-optical components
  • Microfluidics
  • Polydimethylsiloxane
  • Proton beam writing

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

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abstract = "Polydimethylsiloxane (PDMS), a type of silicone rubber, has excellent material properties such as flexibility, optical transparency and biocompatibility. Therefore, it can offer possible applications in the field of microfluidics as flexible micro-optical components, when they can be formed on transparent materials such as silica glass. We performed proton beam writing (PBW) (with 1.0 MeV beam) on PDMS microstructures with curved surface on silica glass. We found that 13-μm thick PDMS films on silica glass are sensitive only for proton fluences above 600 nC/mm2 in contrast with the sensitivity of 4.0 nC/mm2 when using a silicon substrate. Based on the hypothesis that the effective sensitivity was lower due to the electric charging of silica glass surface during PBW, we coated the silica glass surface by Au sputtering. As a result, we were able to observe the formation of PDMS on the Au-coated silica glass at a much lower fluence of 2.0 nC/mm2. Arrays of curved PDMS structures with a height of 13 μm and diameter of 40 μm have been fabricated on a semi-transparent Au-coated silica glass.",
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author = "Keisuke Saito and Hidetaka Hayashi and Hiroyuki Nishikawa",
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AU - Saito, Keisuke

AU - Hayashi, Hidetaka

AU - Nishikawa, Hiroyuki

PY - 2013

Y1 - 2013

N2 - Polydimethylsiloxane (PDMS), a type of silicone rubber, has excellent material properties such as flexibility, optical transparency and biocompatibility. Therefore, it can offer possible applications in the field of microfluidics as flexible micro-optical components, when they can be formed on transparent materials such as silica glass. We performed proton beam writing (PBW) (with 1.0 MeV beam) on PDMS microstructures with curved surface on silica glass. We found that 13-μm thick PDMS films on silica glass are sensitive only for proton fluences above 600 nC/mm2 in contrast with the sensitivity of 4.0 nC/mm2 when using a silicon substrate. Based on the hypothesis that the effective sensitivity was lower due to the electric charging of silica glass surface during PBW, we coated the silica glass surface by Au sputtering. As a result, we were able to observe the formation of PDMS on the Au-coated silica glass at a much lower fluence of 2.0 nC/mm2. Arrays of curved PDMS structures with a height of 13 μm and diameter of 40 μm have been fabricated on a semi-transparent Au-coated silica glass.

AB - Polydimethylsiloxane (PDMS), a type of silicone rubber, has excellent material properties such as flexibility, optical transparency and biocompatibility. Therefore, it can offer possible applications in the field of microfluidics as flexible micro-optical components, when they can be formed on transparent materials such as silica glass. We performed proton beam writing (PBW) (with 1.0 MeV beam) on PDMS microstructures with curved surface on silica glass. We found that 13-μm thick PDMS films on silica glass are sensitive only for proton fluences above 600 nC/mm2 in contrast with the sensitivity of 4.0 nC/mm2 when using a silicon substrate. Based on the hypothesis that the effective sensitivity was lower due to the electric charging of silica glass surface during PBW, we coated the silica glass surface by Au sputtering. As a result, we were able to observe the formation of PDMS on the Au-coated silica glass at a much lower fluence of 2.0 nC/mm2. Arrays of curved PDMS structures with a height of 13 μm and diameter of 40 μm have been fabricated on a semi-transparent Au-coated silica glass.

KW - Micro-lens arrays

KW - Micro-optical components

KW - Microfluidics

KW - Polydimethylsiloxane

KW - Proton beam writing

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