Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing

Y. Shiine, H. Nishikawa, Y. Furuta, K. Kanamitsu, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Contribution to journalArticle

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Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing. / Shiine, Y.; Nishikawa, H.; Furuta, Y.; Kanamitsu, K.; Satoh, T.; Ishii, Y.; Kamiya, T.; Nakao, R.; Uchida, S.

In: Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009)., 01.09.2009.

Research output: Contribution to journalArticle

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title = "Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing",
author = "Y. Shiine and H. Nishikawa and Y. Furuta and K. Kanamitsu and T. Satoh and Y. Ishii and T. Kamiya and R. Nakao and S. Uchida",
year = "2009",
month = "9",
day = "1",
language = "English",
journal = "Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).",

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AU - Shiine, Y.

AU - Nishikawa, H.

AU - Furuta, Y.

AU - Kanamitsu, K.

AU - Satoh, T.

AU - Ishii, Y.

AU - Kamiya, T.

AU - Nakao, R.

AU - Uchida, S.

PY - 2009/9/1

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M3 - Article

JO - Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).

JF - Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).

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