Abstract
TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 407-409 |
| Number of pages | 3 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 79 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2004 Aug |
| Externally published | Yes |
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ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy (miscellaneous)
Cite this
Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses. / Segawa, H.; Matsuo, Shigeki; Misawa, H.
In: Applied Physics A: Materials Science and Processing, Vol. 79, No. 3, 08.2004, p. 407-409.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses
AU - Segawa, H.
AU - Matsuo, Shigeki
AU - Misawa, H.
PY - 2004/8
Y1 - 2004/8
N2 - TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.
AB - TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.
UR - http://www.scopus.com/inward/record.url?scp=3042549946&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3042549946&partnerID=8YFLogxK
U2 - 10.1007/s00339-004-2704-0
DO - 10.1007/s00339-004-2704-0
M3 - Article
AN - SCOPUS:3042549946
VL - 79
SP - 407
EP - 409
JO - Applied Physics
JF - Applied Physics
SN - 0340-3793
IS - 3
ER -