Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses

H. Segawa, Shigeki Matsuo, H. Misawa

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.

Original languageEnglish
Pages (from-to)407-409
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume79
Issue number3
DOIs
Publication statusPublished - 2004 Aug
Externally publishedYes

Fingerprint

multiphoton absorption
Ultrashort pulses
Photons
Fabrication
fabrication
pulses
interference
Light interference
Hybrid materials
alkoxides
Titanium
Sol-gel process
Laser beams
Refractive index
titanium
gels
laser beams
refractivity
lasers

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses. / Segawa, H.; Matsuo, Shigeki; Misawa, H.

In: Applied Physics A: Materials Science and Processing, Vol. 79, No. 3, 08.2004, p. 407-409.

Research output: Contribution to journalArticle

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