Abstract
TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 407-409 |
| Number of pages | 3 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 79 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2004 Aug 1 |
ASJC Scopus subject areas
- Chemistry(all)
- Materials Science(all)
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Segawa, H., Matsuo, S., & Misawa, H. (2004). Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses. Applied Physics A: Materials Science and Processing, 79(3), 407-409. https://doi.org/10.1007/s00339-004-2704-0