Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Sato, Y. Ishii, T. Kamiya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)201-202
Journal7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)
Publication statusPublished - 2007 Jun 7

Cite this

Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW). / Uchiya, N.; Furuta, Y.; Nishikawa, H.; Watanabe, T.; Haga, J.; Sato, T.; Ishii, Y.; Kamiya, T.

In: 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007), 07.06.2007, p. 201-202.

Research output: Contribution to journalArticle

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AU - Watanabe, T.

AU - Haga, J.

AU - Sato, T.

AU - Ishii, Y.

AU - Kamiya, T.

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