Fabrication of high-aspect-ratio pillars by proton beam writing and application to DEP-devices

Y. Furuta, N. Uchiya, H. Nishikawa, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of high-aspect-ratio pillars by proton beam writing and application to DEP-devices'. Together they form a unique fingerprint.

Engineering & Materials Science