Fabrication of iron oxide nanostructures by electron beam-induced deposition

M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

Original languageEnglish
Title of host publicationSelected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
PublisherTrans Tech Publications Ltd
Pages1101-1104
Number of pages4
EditionPART 2
ISBN (Print)0878494626, 9780878494620
DOIs
Publication statusPublished - 2007 Jan 1
Event6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of
Duration: 2007 Nov 52007 Nov 9

Publication series

NameMaterials Science Forum
NumberPART 2
Volume561-565
ISSN (Print)0255-5476

Conference

Conference6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
CountryKorea, Republic of
CityJeju
Period07/11/507/11/9

Keywords

  • Electron beam induced-deposition
  • Iron oxide
  • Nanofabrication

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2007). Fabrication of iron oxide nanostructures by electron beam-induced deposition. In Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 (PART 2 ed., pp. 1101-1104). (Materials Science Forum; Vol. 561-565, No. PART 2). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-462-6.1101