Fabrication of iron oxide nanostructures by electron beam-induced deposition

M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages1101-1104
Number of pages4
Volume561-565
EditionPART 2
Publication statusPublished - 2007
Externally publishedYes
Event6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju
Duration: 2007 Nov 52007 Nov 9

Publication series

NameMaterials Science Forum
NumberPART 2
Volume561-565
ISSN (Print)02555476

Other

Other6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
CityJeju
Period07/11/507/11/9

Fingerprint

Iron oxides
Electron beams
Nanostructures
Fabrication
Carbon
Heat treatment
Iron
Steam
Water vapor
Nanowires
ferric oxide
Deposits
Air

Keywords

  • Electron beam induced-deposition
  • Iron oxide
  • Nanofabrication

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2007). Fabrication of iron oxide nanostructures by electron beam-induced deposition. In Materials Science Forum (PART 2 ed., Vol. 561-565, pp. 1101-1104). (Materials Science Forum; Vol. 561-565, No. PART 2).

Fabrication of iron oxide nanostructures by electron beam-induced deposition. / Shimojo, M.; Takeguchi, M.; Mitsuishi, K.; Tanaka, M.; Furuya, K.

Materials Science Forum. Vol. 561-565 PART 2. ed. 2007. p. 1101-1104 (Materials Science Forum; Vol. 561-565, No. PART 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shimojo, M, Takeguchi, M, Mitsuishi, K, Tanaka, M & Furuya, K 2007, Fabrication of iron oxide nanostructures by electron beam-induced deposition. in Materials Science Forum. PART 2 edn, vol. 561-565, Materials Science Forum, no. PART 2, vol. 561-565, pp. 1101-1104, 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6, Jeju, 07/11/5.
Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K. Fabrication of iron oxide nanostructures by electron beam-induced deposition. In Materials Science Forum. PART 2 ed. Vol. 561-565. 2007. p. 1101-1104. (Materials Science Forum; PART 2).
Shimojo, M. ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Fabrication of iron oxide nanostructures by electron beam-induced deposition. Materials Science Forum. Vol. 561-565 PART 2. ed. 2007. pp. 1101-1104 (Materials Science Forum; PART 2).
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