TY - GEN
T1 - Fabrication of iron oxide nanostructures by electron beam-induced deposition
AU - Shimojo, M.
AU - Takeguchi, M.
AU - Mitsuishi, K.
AU - Tanaka, M.
AU - Furuya, K.
PY - 2007/1/1
Y1 - 2007/1/1
N2 - Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.
AB - Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.
KW - Electron beam induced-deposition
KW - Iron oxide
KW - Nanofabrication
UR - http://www.scopus.com/inward/record.url?scp=38349122505&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38349122505&partnerID=8YFLogxK
U2 - 10.4028/0-87849-462-6.1101
DO - 10.4028/0-87849-462-6.1101
M3 - Conference contribution
AN - SCOPUS:38349122505
SN - 0878494626
SN - 9780878494620
T3 - Materials Science Forum
SP - 1101
EP - 1104
BT - Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
PB - Trans Tech Publications Ltd
T2 - 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Y2 - 5 November 2007 through 9 November 2007
ER -