Fabrication of magnetic nanostructures by electron beam induced deposition

Masaki Takeguchi, Masayuki Shimojo

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

Original languageEnglish
Title of host publicationNanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications
PublisherWorld Scientific Publishing Co.
Pages45-61
Number of pages17
ISBN (Print)9789814273060, 9789814273053
DOIs
Publication statusPublished - 2010 Jan 1
Externally publishedYes

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ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Takeguchi, M., & Shimojo, M. (2010). Fabrication of magnetic nanostructures by electron beam induced deposition. In Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications (pp. 45-61). World Scientific Publishing Co.. https://doi.org/10.1142/9789814273060_0003