Abstract
Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.
| Original language | English |
|---|---|
| Title of host publication | Nanomagnetism and Spintronics |
| Subtitle of host publication | Fabrication, Materials, Characterization and Applications |
| Publisher | World Scientific Publishing Co. |
| Pages | 45-61 |
| Number of pages | 17 |
| ISBN (Electronic) | 9789814273060 |
| ISBN (Print) | 9789814273053 |
| DOIs | |
| Publication status | Published - 2010 Jan 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Biochemistry, Genetics and Molecular Biology(all)
- Engineering(all)
- Physics and Astronomy(all)