Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

Research output: Contribution to journalArticle

62 Citations (Scopus)

Abstract

Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.

Original languageEnglish
Pages (from-to)1321-1325
Number of pages5
JournalNanotechnology
Volume16
Issue number8
DOIs
Publication statusPublished - 2005 Aug 1
Externally publishedYes

Fingerprint

Chemical vapor deposition
Electron beams
Nanostructures
Iron
vapor deposition
electron beams
iron
Fabrication
fabrication
Nanorods
nanorods
Electron holography
Magnetic flux
Iron oxides
iron oxides
Chemical elements
holography
Powders
Nanocrystals
magnetic flux

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition. / Takeguchi, Masaki; Shimojo, Masayuki; Furuya, Kazuo.

In: Nanotechnology, Vol. 16, No. 8, 01.08.2005, p. 1321-1325.

Research output: Contribution to journalArticle

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