Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

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67 Citations (Scopus)

Abstract

Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.

Original languageEnglish
Pages (from-to)1321-1325
Number of pages5
JournalNanotechnology
Volume16
Issue number8
DOIs
Publication statusPublished - 2005 Aug 1
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

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