Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing

Tatsuhiko Aizawa; Hiroshi Tamagaki; Kenji Wasa

doi:10.1115/1.4039358

Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing

Tatsuhiko Aizawa, Hiroshi Tamagaki, Kenji Wasa

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.

Original language	English
Article number	021007
Journal	Journal of Micro and Nano-Manufacturing
Volume	6
Issue number	2
DOIs	https://doi.org/10.1115/1.4039358
Publication status	Published - 2018 Jun 1

ASJC Scopus subject areas

Process Chemistry and Technology
Industrial and Manufacturing Engineering
Mechanics of Materials

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abstract = "The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.",

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