Abstract
The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.
| Original language | English |
|---|---|
| Article number | 021007 |
| Journal | Journal of Micro and Nano-Manufacturing |
| Volume | 6 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2018 Jun 1 |
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ASJC Scopus subject areas
- Process Chemistry and Technology
- Industrial and Manufacturing Engineering
- Mechanics of Materials
Cite this
Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing. / Aizawa, Tatsuhiko; Tamagaki, Hiroshi; Wasa, Kenji.
In: Journal of Micro and Nano-Manufacturing, Vol. 6, No. 2, 021007, 01.06.2018.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing
AU - Aizawa, Tatsuhiko
AU - Tamagaki, Hiroshi
AU - Wasa, Kenji
PY - 2018/6/1
Y1 - 2018/6/1
N2 - The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.
AB - The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.
UR - http://www.scopus.com/inward/record.url?scp=85045025321&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85045025321&partnerID=8YFLogxK
U2 - 10.1115/1.4039358
DO - 10.1115/1.4039358
M3 - Article
AN - SCOPUS:85045025321
VL - 6
JO - Journal of Micro and Nano-Manufacturing
JF - Journal of Micro and Nano-Manufacturing
SN - 2166-0468
IS - 2
M1 - 021007
ER -