Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing

Tatsuhiko Aizawa, Hiroshi Tamagaki, Kenji Wasa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.

Original languageEnglish
Article number021007
JournalJournal of Micro and Nano-Manufacturing
Volume6
Issue number2
DOIs
Publication statusPublished - 2018 Jun 1

Fingerprint

Diamond
Printing
Diamonds
Nozzles
Computer aided design
Carbon
Plasmas
Fabrication
Anisotropic etching
Oxidation
Diamond like carbon films
Tool steel
Carbon films
Thick films
Lithography
Stars
Geometry
Substrates
Processing

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Industrial and Manufacturing Engineering
  • Mechanics of Materials

Cite this

Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing. / Aizawa, Tatsuhiko; Tamagaki, Hiroshi; Wasa, Kenji.

In: Journal of Micro and Nano-Manufacturing, Vol. 6, No. 2, 021007, 01.06.2018.

Research output: Contribution to journalArticle

Aizawa, Tatsuhiko ; Tamagaki, Hiroshi ; Wasa, Kenji. / Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing. In: Journal of Micro and Nano-Manufacturing. 2018 ; Vol. 6, No. 2.
@article{6f59748e9d204562af6167152860c2b1,
title = "Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing",
abstract = "The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.",
author = "Tatsuhiko Aizawa and Hiroshi Tamagaki and Kenji Wasa",
year = "2018",
month = "6",
day = "1",
doi = "10.1115/1.4039358",
language = "English",
volume = "6",
journal = "Journal of Micro and Nano-Manufacturing",
issn = "2166-0468",
publisher = "American Society of Mechanical Engineers(ASME)",
number = "2",

}

TY - JOUR

T1 - Fabrication of micro diamond- like Carbon-Nozzles by plasma oxidation printing

AU - Aizawa, Tatsuhiko

AU - Tamagaki, Hiroshi

AU - Wasa, Kenji

PY - 2018/6/1

Y1 - 2018/6/1

N2 - The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.

AB - The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 lm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.

UR - http://www.scopus.com/inward/record.url?scp=85045025321&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85045025321&partnerID=8YFLogxK

U2 - 10.1115/1.4039358

DO - 10.1115/1.4039358

M3 - Article

AN - SCOPUS:85045025321

VL - 6

JO - Journal of Micro and Nano-Manufacturing

JF - Journal of Micro and Nano-Manufacturing

SN - 2166-0468

IS - 2

M1 - 021007

ER -