TY - GEN
T1 - Fabrication of Monocrystalline-Based Composite PZT Thin Film with Polycrystalline Crack Stopper Structure
AU - Katsumata, Yu
AU - Yoshida, Shinya
AU - Tanaka, Shuji
N1 - Funding Information:
This work was partly supported by JSPS KAKENHI (Grant Number 19K05231) and the Asahi Glass Foundation. It was also supported by Nanotechnology Platform Project in Tohoku University sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. (JPMX09F(A)-F-21-TU-w029)
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This paper reports on a new type of Pb(Zr, Ti)O3 (PZT) thin film, where monocrystalline (Mono) PZT is sectioned by narrow mesh-like polycrystalline (Poly) PZT. This Mono-Poly composite PZT thin film basically has unique characteristics of the Mono PZT such as reasonably high piezoelectric constant and low dielectric constant. In addition, accidental crack propagation in the Mono PZT is stopped by the Poly PZT. The motivation of this study is to solve the easy-to-fracture nature of single crystals, which is the case with Mono PZT. We successfully sputter-deposited the Mono-Poly composite thin film on a Si substrate covered with a patterned underlayer. Indentation tests demonstrated that the Poly PZT patterns prevented the crack propagation across Mono PZT areas. That is expected to improve the mechanical robustness of the entire film.
AB - This paper reports on a new type of Pb(Zr, Ti)O3 (PZT) thin film, where monocrystalline (Mono) PZT is sectioned by narrow mesh-like polycrystalline (Poly) PZT. This Mono-Poly composite PZT thin film basically has unique characteristics of the Mono PZT such as reasonably high piezoelectric constant and low dielectric constant. In addition, accidental crack propagation in the Mono PZT is stopped by the Poly PZT. The motivation of this study is to solve the easy-to-fracture nature of single crystals, which is the case with Mono PZT. We successfully sputter-deposited the Mono-Poly composite thin film on a Si substrate covered with a patterned underlayer. Indentation tests demonstrated that the Poly PZT patterns prevented the crack propagation across Mono PZT areas. That is expected to improve the mechanical robustness of the entire film.
KW - Pb(Zr
KW - Ti)O3 (PZT)
KW - composite
KW - indentation
KW - mechanical robustness
KW - monocrystalline thin film
KW - polycrystalline thin film
UR - http://www.scopus.com/inward/record.url?scp=85126397086&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85126397086&partnerID=8YFLogxK
U2 - 10.1109/MEMS51670.2022.9699644
DO - 10.1109/MEMS51670.2022.9699644
M3 - Conference contribution
AN - SCOPUS:85126397086
T3 - IEEE Symposium on Mass Storage Systems and Technologies
SP - 543
EP - 546
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - IEEE Computer Society
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -