Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

T. Arakawa, H. Kudo, H. Sato, H. Kobayashi, T. Izumi, S. Ohtsuka, K. Mori, S. Shoji, T. Osaka, T. Homma, K. Mitsuda, N. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, Kenji Yoshida & 11 others Y. Ishisaki, U. Morita, T. Koga, K. Shinozaki, K. Sato, N. Takai, T. Ohashi, Y. Kuroda, M. Onishi, M. Goto, F. Beppu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

Original languageEnglish
Pages (from-to)456-459
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume520
Issue number1-3
DOIs
Publication statusPublished - 2004 Mar 11
Externally publishedYes

Fingerprint

calorimeters
absorbers
Pixels
pixels
Fabrication
X rays
fabrication
x rays
Photolithography
photolithography
Calorimeters
Image sensors
Electrodeposition
electrodeposition
wafers
membranes
Membranes
Imaging techniques
Finite element method
simulation

Keywords

  • Bi absorber
  • Calorimeter
  • FEM analysis
  • Sn absorber

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber. / Arakawa, T.; Kudo, H.; Sato, H.; Kobayashi, H.; Izumi, T.; Ohtsuka, S.; Mori, K.; Shoji, S.; Osaka, T.; Homma, T.; Mitsuda, K.; Yamasaki, N.; Fujimoto, R.; Iyomoto, N.; Oshima, T.; Futamoto, K.; Takei, Y.; Ichitsubo, T.; Fujimori, T.; Yoshida, Kenji; Ishisaki, Y.; Morita, U.; Koga, T.; Shinozaki, K.; Sato, K.; Takai, N.; Ohashi, T.; Kuroda, Y.; Onishi, M.; Goto, M.; Beppu, F.

In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 520, No. 1-3, 11.03.2004, p. 456-459.

Research output: Contribution to journalArticle

Arakawa, T, Kudo, H, Sato, H, Kobayashi, H, Izumi, T, Ohtsuka, S, Mori, K, Shoji, S, Osaka, T, Homma, T, Mitsuda, K, Yamasaki, N, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Yoshida, K, Ishisaki, Y, Morita, U, Koga, T, Shinozaki, K, Sato, K, Takai, N, Ohashi, T, Kuroda, Y, Onishi, M, Goto, M & Beppu, F 2004, 'Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber', Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 520, no. 1-3, pp. 456-459. https://doi.org/10.1016/j.nima.2003.11.371
Arakawa, T. ; Kudo, H. ; Sato, H. ; Kobayashi, H. ; Izumi, T. ; Ohtsuka, S. ; Mori, K. ; Shoji, S. ; Osaka, T. ; Homma, T. ; Mitsuda, K. ; Yamasaki, N. ; Fujimoto, R. ; Iyomoto, N. ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ; Fujimori, T. ; Yoshida, Kenji ; Ishisaki, Y. ; Morita, U. ; Koga, T. ; Shinozaki, K. ; Sato, K. ; Takai, N. ; Ohashi, T. ; Kuroda, Y. ; Onishi, M. ; Goto, M. ; Beppu, F. / Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber. In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2004 ; Vol. 520, No. 1-3. pp. 456-459.
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AU - Arakawa, T.

AU - Kudo, H.

AU - Sato, H.

AU - Kobayashi, H.

AU - Izumi, T.

AU - Ohtsuka, S.

AU - Mori, K.

AU - Shoji, S.

AU - Osaka, T.

AU - Homma, T.

AU - Mitsuda, K.

AU - Yamasaki, N.

AU - Fujimoto, R.

AU - Iyomoto, N.

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Yoshida, Kenji

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Shinozaki, K.

AU - Sato, K.

AU - Takai, N.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Goto, M.

AU - Beppu, F.

PY - 2004/3/11

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