Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties

Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density B _r values of the nanostructures were also changed depending on the iron concentration.