Fabrication of photonic crystal structures by femtosecond laser-induced photopolymerization of organic-inorganic film

Hiroyo Segawa, Kazuaki Yoshida, Toshiaki Kondo, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journalArticle

20 Citations (Scopus)


We report on a fabrication of photonic crystal structures in organic-inorganic hybrid films by a laser interference technique. Films containing the methacrylic group, which is photopolymerable by an adequate laser light, are prepared using a sol-gel technique from a mixture of organosilicate alkoxide and zirconium alkoxide modified by methacrylic acid. For the photopolymerization, the coated films on glass substrate are exposed to the interference light which is arranged with a square lattice in about 1 μm spacing. From microscopic images of microstructures produced by the photopolymerization, the influence of changes in conditions such as pre-bake temperature, photoinitiator and irradiation energy (laser power and duration time) on periodic structure is investigated. Adjusting the conditions, 2D and 3D photonic crystal structures with the micrometer-order period are formed in organo-silicate-zirconate hybrid materials.

Original languageEnglish
Pages (from-to)1023-1027
Number of pages5
JournalJournal of Sol-Gel Science and Technology
Issue number1-3
Publication statusPublished - 2003 Jan 1



  • Hybrid material
  • Laser interference technique
  • Organo-silicate-zirconate
  • Photonic crystal

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

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