Fabrication of PMMA film waveguides utilizing proton beam writing

Kenta Miura, Takahiro Satoh, Yasuyuki Ishii, Masashi Kohka, Yuki Machida, Masato Uehara, Hiromu Kiryu, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya, Hiroyuki Nishikawa, Tomoyuki Sasaki, Osamu Hanaizumi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.

Original languageEnglish
Title of host publication16th Opto-Electronics and Communications Conference, OECC 2011
Pages303-304
Number of pages2
Publication statusPublished - 2011
Event16th Opto-Electronics and Communications Conference, OECC 2011 - Kaohsiung
Duration: 2011 Jul 42011 Jul 8

Other

Other16th Opto-Electronics and Communications Conference, OECC 2011
CityKaohsiung
Period11/7/411/7/8

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ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Communication

Cite this

Miura, K., Satoh, T., Ishii, Y., Kohka, M., Machida, Y., Uehara, M., ... Hanaizumi, O. (2011). Fabrication of PMMA film waveguides utilizing proton beam writing. In 16th Opto-Electronics and Communications Conference, OECC 2011 (pp. 303-304). [6015135]