Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

Yuta Maeyoshi, Katsuyoshi Takano, Atsushi Asano, Hiromi Marui, Masaaki Omichi, Takahiro Satoh, Tomihiro Kamiya, Yasuyuki Ishii, Takeru Ohkubo, Masashi Koka, Wataru Kada, Masaki Sugimoto, Hiroyuki Nishikawa, Akinori Saeki, Shu Seki

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1 Citation (Scopus)

Abstract

A new and direct nano-microprocessing technique for poly(9,9'- dioctylfluorene) (PFO) films using proton beam writing (PBW) based on the crosslinking reaction of the polymer without a cross-linking agent was proposed. Not only the surface morphology but also structure size and shape on PFO films can be controlled from the nanometer to micrometer scale by adjusting the fluence of incident protons. Fabrication of three-dimensional PFO structures with an aspect ratio of 12 was successfully demonstrated by PBW with the adjustment of fluence at 3.5 x 10 6 ions/μm 2.

Original languageEnglish
Article number045201
JournalJapanese Journal of Applied Physics
Volume51
Issue number4 PART 1
DOIs
Publication statusPublished - 2012 Apr

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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