A new and direct nano-microprocessing technique for poly(9,9'- dioctylfluorene) (PFO) films using proton beam writing (PBW) based on the crosslinking reaction of the polymer without a cross-linking agent was proposed. Not only the surface morphology but also structure size and shape on PFO films can be controlled from the nanometer to micrometer scale by adjusting the fluence of incident protons. Fabrication of three-dimensional PFO structures with an aspect ratio of 12 was successfully demonstrated by PBW with the adjustment of fluence at 3.5 x 10 6 ions/μm 2.
ASJC Scopus subject areas
- Physics and Astronomy(all)