Fabrication of polymer optical waveguides for the 1.5-μm band using focused proton beam

Kenta Miura, Yuki Machida, Masato Uehara, Hiromu Kiryu, Yusuke Ozawa, Tomoyuki Sasaki, Osamu Hanaizumi, Takahiro Satoh, Yasuyuki Ishii, Masashi Kohka, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly(methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.

Original languageEnglish
Title of host publicationSilicon Science and Advanced Micro-Device Engineering II
PublisherTrans Tech Publications Ltd
Pages147-150
Number of pages4
ISBN (Print)9783037852859
DOIs
Publication statusPublished - 2012
Event6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, ISSS and AMDE 2010 - Kiryu, Japan
Duration: 2010 Dec 92010 Dec 10

Publication series

NameKey Engineering Materials
Volume497
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, ISSS and AMDE 2010
CountryJapan
CityKiryu
Period10/12/910/12/10

Keywords

  • 1.5-μm band
  • Optical waveguide
  • PMMA
  • Proton beam writing
  • Single mode
  • Y junction

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Miura, K., Machida, Y., Uehara, M., Kiryu, H., Ozawa, Y., Sasaki, T., Hanaizumi, O., Satoh, T., Ishii, Y., Kohka, M., Takano, K., Ohkubo, T., Yamazaki, A., Kada, W., Yokoyama, A., Kamiya, T., & Nishikawa, H. (2012). Fabrication of polymer optical waveguides for the 1.5-μm band using focused proton beam. In Silicon Science and Advanced Micro-Device Engineering II (pp. 147-150). (Key Engineering Materials; Vol. 497). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.497.147