Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

M. Song, K. Mitsuishi, M. Tanaka, M. Takeguchi, Masayuki Shimojo, K. Furuya

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Self-standing tungsten nanowires, nanodendrites, and nanofractal-like trees were fabricated on insulator (Al2O3) substrates with a process of electron-beam-induced decomposition in a transmission electron microscope. The conditions for fabricating different morphologies are described. The fabricated structures are characterized with high-resolution transmission electron microscopy and X-ray energy-dispersive spectroscopy. A high concentration of tungsten and a high crystallinity of the structure are confirmed. The growth process is discussed, involving charges produced on the surface of the substrate and the behavior of precursor molecules under electron-beam irradiation. The formation of these structures is considered to relate to nanoscaled unevenness of the charge distribution on the surface of the substrate, movement of charges to the convex surface of the substrate, and accumulation of charges at the tips of the grown structures.

Original languageEnglish
Pages (from-to)1431-1436
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Volume80
Issue number7
DOIs
Publication statusPublished - 2005 Apr
Externally publishedYes

Fingerprint

Nanowires
Electron beams
nanowires
insulators
electron beams
Fabrication
fabrication
Tungsten
Substrates
tungsten
Charge distribution
High resolution transmission electron microscopy
charge distribution
crystallinity
Electron microscopes
electron microscopes
Irradiation
Decomposition
decomposition
transmission electron microscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition. / Song, M.; Mitsuishi, K.; Tanaka, M.; Takeguchi, M.; Shimojo, Masayuki; Furuya, K.

In: Applied Physics A: Materials Science and Processing, Vol. 80, No. 7, 04.2005, p. 1431-1436.

Research output: Contribution to journalArticle

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