Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing

R. Tsuchiya, *H. Nishikawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)325-328
JournalTransactions of the Materials Research Society of Japan
Volume36
Publication statusPublished - 2011 Sep 1

Cite this

@article{96a9bb7c37834167be5657c1e649232a,
title = "Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing",
author = "R. Tsuchiya and *H. Nishikawa",
year = "2011",
month = "9",
day = "1",
language = "English",
volume = "36",
pages = "325--328",
journal = "Transactions of the Materials Research Society of Japan",

}

TY - JOUR

T1 - Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing

AU - Tsuchiya, R.

AU - Nishikawa, H.

PY - 2011/9/1

Y1 - 2011/9/1

M3 - Article

VL - 36

SP - 325

EP - 328

JO - Transactions of the Materials Research Society of Japan

JF - Transactions of the Materials Research Society of Japan

ER -