Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing

R. Tsuchiya, *H. Nishikawa

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)325-328
JournalTransactions of the Materials Research Society of Japan
Volume36
Publication statusPublished - 2011 Sept 1

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