Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing

R. Tsuchiya, *H. Nishikawa

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)325-328
JournalTransactions of the Materials Research Society of Japan
Volume36
Publication statusPublished - 2011 Sep 1

Cite this

Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing. / Tsuchiya, R.; Nishikawa, *H.

In: Transactions of the Materials Research Society of Japan, Vol. 36, 01.09.2011, p. 325-328.

Research output: Contribution to journal › Article

Tsuchiya, R & Nishikawa, H 2011, 'Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing', Transactions of the Materials Research Society of Japan, vol. 36, pp. 325-328.
Tsuchiya R, Nishikawa H. Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing. Transactions of the Materials Research Society of Japan. 2011 Sep 1;36:325-328.
Tsuchiya, R. ; Nishikawa, *H. / Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing. In: Transactions of the Materials Research Society of Japan. 2011 ; Vol. 36. pp. 325-328.
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