Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.

Original languageEnglish
Article number250
JournalNew Journal of Physics
Volume8
DOIs
Publication statusPublished - 2006 Oct 24
Externally publishedYes

Fingerprint

photoresists
lithography
microstructure
fabrication
micrometers
sapphire
air
cross sections
symmetry
pulses
lasers

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography. / Kondo, Toshiaki; Juodkazis, Saulius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.

In: New Journal of Physics, Vol. 8, 250, 24.10.2006.

Research output: Contribution to journalArticle

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