Abstract
Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.
| Original language | English |
|---|---|
| Article number | 250 |
| Journal | New Journal of Physics |
| Volume | 8 |
| DOIs | |
| Publication status | Published - 2006 Oct 24 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography. / Kondo, Toshiaki; Juodkazis, Saulius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.
In: New Journal of Physics, Vol. 8, 250, 24.10.2006.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography
AU - Kondo, Toshiaki
AU - Juodkazis, Saulius
AU - Mizeikis, Vygantas
AU - Matsuo, Shigeki
AU - Misawa, Hiroaki
PY - 2006/10/24
Y1 - 2006/10/24
N2 - Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.
AB - Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.
UR - http://www.scopus.com/inward/record.url?scp=33750363761&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750363761&partnerID=8YFLogxK
U2 - 10.1088/1367-2630/8/10/250
DO - 10.1088/1367-2630/8/10/250
M3 - Article
VL - 8
JO - New Journal of Physics
JF - New Journal of Physics
SN - 1367-2630
M1 - 250
ER -