Fabrication of Three-Dimensional Pillar Arrays by PBW for Improved Trapping Performance of Dielectrophoretic Devices

Yasuharu Shiine, Yusuke Sakashita, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)150
Journal12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts
Publication statusPublished - 2010 Jul 1

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