Fatigue testing machine of micro-sized specimens for MEMS applications

Y. Higo, K. Takashima, Masayuki Shimojo, S. Sugiura, B. Pfister, M. V. Swain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

37 Citations (Scopus)

Abstract

A new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 μm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 μm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 μN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 μm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 μm 3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages241-246
Number of pages6
Volume605
Publication statusPublished - 2000
Externally publishedYes
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices II - Boaton, MA, USA
Duration: 1999 Nov 291999 Dec 1

Other

OtherMaterials Science of Microelectromechanical Systems (MEMS) Devices II
CityBoaton, MA, USA
Period99/11/2999/12/1

Fingerprint

Diamond
Fatigue testing
MEMS
Diamonds
Actuators
Stepping motors
Cyclic loads
Focused ion beams
Cantilever beams
Amorphous films
Strain gages
Loads (forces)
Machining
Metals
Stiffness
Fatigue of materials
Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Higo, Y., Takashima, K., Shimojo, M., Sugiura, S., Pfister, B., & Swain, M. V. (2000). Fatigue testing machine of micro-sized specimens for MEMS applications. In Materials Research Society Symposium - Proceedings (Vol. 605, pp. 241-246). Materials Research Society.

Fatigue testing machine of micro-sized specimens for MEMS applications. / Higo, Y.; Takashima, K.; Shimojo, Masayuki; Sugiura, S.; Pfister, B.; Swain, M. V.

Materials Research Society Symposium - Proceedings. Vol. 605 Materials Research Society, 2000. p. 241-246.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Higo, Y, Takashima, K, Shimojo, M, Sugiura, S, Pfister, B & Swain, MV 2000, Fatigue testing machine of micro-sized specimens for MEMS applications. in Materials Research Society Symposium - Proceedings. vol. 605, Materials Research Society, pp. 241-246, Materials Science of Microelectromechanical Systems (MEMS) Devices II, Boaton, MA, USA, 99/11/29.
Higo Y, Takashima K, Shimojo M, Sugiura S, Pfister B, Swain MV. Fatigue testing machine of micro-sized specimens for MEMS applications. In Materials Research Society Symposium - Proceedings. Vol. 605. Materials Research Society. 2000. p. 241-246
Higo, Y. ; Takashima, K. ; Shimojo, Masayuki ; Sugiura, S. ; Pfister, B. ; Swain, M. V. / Fatigue testing machine of micro-sized specimens for MEMS applications. Materials Research Society Symposium - Proceedings. Vol. 605 Materials Research Society, 2000. pp. 241-246
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