FE-B-NB-ND magnetic metallic glass thin film for MEMS/NEMS structure

T. A. Phan, S. M. Lee, A. Makino, H. Oguchi, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages428-431
Number of pages4
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Phan, T. A., Lee, S. M., Makino, A., Oguchi, H., & Kuwano, H. (2011). FE-B-NB-ND magnetic metallic glass thin film for MEMS/NEMS structure. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 428-431). [5734453] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734453