Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems

T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


In the present study, we investigate the mechanical properties, residual stress, and microprocessing compatibility of Fe67.5B 22.5Nd6.3Nb3.7 metallic glass thin films (Fe-MGTFs). The mechanical properties are measured using a specially designed microtensile tester. The fracture toughness of the Fe-MGTF (6.36 MPa × m1/2) is more than twice that of Si, and the highest among the thin films developed for microelectromechanical systems (MEMS) to this point. In addition, the fabrication of freestanding microcantilevers illustrates the low residual stress and high microprocessing compatibility of Fe-MGTFs. The present study verifies the great potential of Fe-MGTFs for use in MEMS.

Original languageEnglish
Article number181901
JournalApplied Physics Letters
Issue number18
Publication statusPublished - 2013 Oct 28
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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