Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Shigeki Matsuo, Haruki Sumi, Satoshi Kiyama, Takuro Tomita, Shuichi Hashimoto

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.

Original languageEnglish
Pages (from-to)9758-9760
Number of pages3
JournalApplied Surface Science
Volume255
Issue number24
DOIs
Publication statusPublished - 2009 Sep 30
Externally publishedYes

Fingerprint

Ultrashort pulses
Etching
Glass
Potassium hydroxide
Borosilicate glass
Microchannels
Fabrication
Processing
potassium hydroxide

Keywords

  • Femtosecond laser-assisted etching
  • Potassium hydroxide (KOH)
  • Pyrex glass
  • Selective etching

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH. / Matsuo, Shigeki; Sumi, Haruki; Kiyama, Satoshi; Tomita, Takuro; Hashimoto, Shuichi.

In: Applied Surface Science, Vol. 255, No. 24, 30.09.2009, p. 9758-9760.

Research output: Contribution to journalArticle

Matsuo, Shigeki ; Sumi, Haruki ; Kiyama, Satoshi ; Tomita, Takuro ; Hashimoto, Shuichi. / Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH. In: Applied Surface Science. 2009 ; Vol. 255, No. 24. pp. 9758-9760.
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