Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Shigeki Matsuo; Haruki Sumi; Satoshi Kiyama; Takuro Tomita; Shuichi Hashimoto

doi:10.1016/j.apsusc.2009.04.065

Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Shigeki Matsuo, Haruki Sumi, Satoshi Kiyama, Takuro Tomita, Shuichi Hashimoto

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.

Original language	English
Pages (from-to)	9758-9760
Number of pages	3
Journal	Applied Surface Science
Volume	255
Issue number	24
DOIs	https://doi.org/10.1016/j.apsusc.2009.04.065
Publication status	Published - 2009 Sept 30
Externally published	Yes

Keywords

Femtosecond laser-assisted etching
Potassium hydroxide (KOH)
Pyrex glass
Selective etching

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2009.04.065

Cite this

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abstract = "A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.",

keywords = "Femtosecond laser-assisted etching, Potassium hydroxide (KOH), Pyrex glass, Selective etching",

author = "Shigeki Matsuo and Haruki Sumi and Satoshi Kiyama and Takuro Tomita and Shuichi Hashimoto",

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AU - Matsuo, Shigeki

AU - Sumi, Haruki

AU - Kiyama, Satoshi

AU - Tomita, Takuro

AU - Hashimoto, Shuichi

PY - 2009/9/30

Y1 - 2009/9/30

N2 - A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.

AB - A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.

KW - Femtosecond laser-assisted etching

KW - Potassium hydroxide (KOH)

KW - Pyrex glass

KW - Selective etching

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JO - Applied Surface Science

JF - Applied Surface Science

IS - 24

ER -

Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Abstract

Keywords

ASJC Scopus subject areas

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