TY - JOUR
T1 - Femtosecond laser assisted etching of quartz
T2 - Microstructuring from inside
AU - Matsuo, S.
AU - Tabuchi, Y.
AU - Okada, T.
AU - Juodkazis, S.
AU - Misawa, H.
PY - 2006/7/1
Y1 - 2006/7/1
N2 - In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed.
AB - In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed.
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U2 - 10.1007/s00339-006-3603-3
DO - 10.1007/s00339-006-3603-3
M3 - Article
AN - SCOPUS:33646790181
SN - 0947-8396
VL - 84
SP - 99
EP - 102
JO - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
IS - 1-2
ER -