Femtosecond laser assisted etching of quartz: Microstructuring from inside

S. Matsuo, Y. Tabuchi, T. Okada, S. Juodkazis, H. Misawa

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed.

Original languageEnglish
Pages (from-to)99-102
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume84
Issue number1-2
DOIs
Publication statusPublished - 2006 Jul 1
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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