Abstract
We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).
| Original language | English |
|---|---|
| Pages (from-to) | 277-279 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 26 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2001 Mar 1 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
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Marcinkevičius, A., Juodkazis, S., Watanabe, M., Miwa, M., Matsuo, S., Misawa, H., & Nishii, J. (2001). Femtosecond laser-assisted three-dimensional microfabrication in silica. Optics Letters, 26(5), 277-279. https://doi.org/10.1364/OL.26.000277