Femtosecond laser-assisted three-dimensional microfabrication in silica

Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, Junji Nishii

Research output: Contribution to journalArticle

523 Citations (Scopus)

Abstract

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).

Original languageEnglish
Pages (from-to)277-279
Number of pages3
JournalOptics Letters
Volume26
Issue number5
Publication statusPublished - 2001 Mar 1
Externally publishedYes

Fingerprint

silica glass
silicon dioxide
fabrication
high aspect ratio
lasers
slabs
etching
aqueous solutions
acids
pulses

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Marcinkevičius, A., Juodkazis, S., Watanabe, M., Miwa, M., Matsuo, S., Misawa, H., & Nishii, J. (2001). Femtosecond laser-assisted three-dimensional microfabrication in silica. Optics Letters, 26(5), 277-279.

Femtosecond laser-assisted three-dimensional microfabrication in silica. / Marcinkevičius, Andrius; Juodkazis, Saulius; Watanabe, Mitsuru; Miwa, Masafumi; Matsuo, Shigeki; Misawa, Hiroaki; Nishii, Junji.

In: Optics Letters, Vol. 26, No. 5, 01.03.2001, p. 277-279.

Research output: Contribution to journalArticle

Marcinkevičius, A, Juodkazis, S, Watanabe, M, Miwa, M, Matsuo, S, Misawa, H & Nishii, J 2001, 'Femtosecond laser-assisted three-dimensional microfabrication in silica', Optics Letters, vol. 26, no. 5, pp. 277-279.
Marcinkevičius A, Juodkazis S, Watanabe M, Miwa M, Matsuo S, Misawa H et al. Femtosecond laser-assisted three-dimensional microfabrication in silica. Optics Letters. 2001 Mar 1;26(5):277-279.
Marcinkevičius, Andrius ; Juodkazis, Saulius ; Watanabe, Mitsuru ; Miwa, Masafumi ; Matsuo, Shigeki ; Misawa, Hiroaki ; Nishii, Junji. / Femtosecond laser-assisted three-dimensional microfabrication in silica. In: Optics Letters. 2001 ; Vol. 26, No. 5. pp. 277-279.
@article{8ed80ade64bd4c4b903c20762eee1045,
title = "Femtosecond laser-assisted three-dimensional microfabrication in silica",
abstract = "We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5{\%} aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).",
author = "Andrius Marcinkevičius and Saulius Juodkazis and Mitsuru Watanabe and Masafumi Miwa and Shigeki Matsuo and Hiroaki Misawa and Junji Nishii",
year = "2001",
month = "3",
day = "1",
language = "English",
volume = "26",
pages = "277--279",
journal = "Optics Letters",
issn = "0146-9592",
publisher = "The Optical Society",
number = "5",

}

TY - JOUR

T1 - Femtosecond laser-assisted three-dimensional microfabrication in silica

AU - Marcinkevičius, Andrius

AU - Juodkazis, Saulius

AU - Watanabe, Mitsuru

AU - Miwa, Masafumi

AU - Matsuo, Shigeki

AU - Misawa, Hiroaki

AU - Nishii, Junji

PY - 2001/3/1

Y1 - 2001/3/1

N2 - We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).

AB - We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).

UR - http://www.scopus.com/inward/record.url?scp=0037489260&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037489260&partnerID=8YFLogxK

M3 - Article

VL - 26

SP - 277

EP - 279

JO - Optics Letters

JF - Optics Letters

SN - 0146-9592

IS - 5

ER -