Femtosecond laser-assisted three-dimensional microfabrication in silica

Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, Junji Nishii

Research output: Contribution to journalArticlepeer-review

656 Citations (Scopus)


We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).

Original languageEnglish
Pages (from-to)277-279
Number of pages3
JournalOptics Letters
Issue number5
Publication statusPublished - 2001 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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