Abstract
We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).
| Original language | English |
|---|---|
| Pages (from-to) | 277-279 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 26 |
| Issue number | 5 |
| Publication status | Published - 2001 Mar 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
Cite this
Femtosecond laser-assisted three-dimensional microfabrication in silica. / Marcinkevičius, Andrius; Juodkazis, Saulius; Watanabe, Mitsuru; Miwa, Masafumi; Matsuo, Shigeki; Misawa, Hiroaki; Nishii, Junji.
In: Optics Letters, Vol. 26, No. 5, 01.03.2001, p. 277-279.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Femtosecond laser-assisted three-dimensional microfabrication in silica
AU - Marcinkevičius, Andrius
AU - Juodkazis, Saulius
AU - Watanabe, Mitsuru
AU - Miwa, Masafumi
AU - Matsuo, Shigeki
AU - Misawa, Hiroaki
AU - Nishii, Junji
PY - 2001/3/1
Y1 - 2001/3/1
N2 - We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).
AB - We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).
UR - http://www.scopus.com/inward/record.url?scp=0037489260&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0037489260&partnerID=8YFLogxK
M3 - Article
VL - 26
SP - 277
EP - 279
JO - Optics Letters
JF - Optics Letters
SN - 0146-9592
IS - 5
ER -