Femtosecond laser-induced surface patterning on 4H-SiC

Takuro Tomita, Ryota Kumai, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimto, Hirokazu Nagase, Makoto Nakajima, Tohru Suemoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Femtosecond laser-induced periodic structures, so-called "ripples", were systematically studied under various incident laser wavelengths and polarization properties. The effect of the excitation wavelength on the period of ripples was investigated from the infrared to ultraviolet laser pulses. The period of ripple on 4H-SiC correlated remarkably with the wavelength of the incident laser beam. This means that the period of ripples can be controlled by the wavelength of the laser beam. The irradiation of circular polarized femtosecond laser beam produced dot-like structures with the mean spacing of about 200 nm on the surface of 4H-SiC. The effect of initial surface roughness was also studied.

Original languageEnglish
Pages (from-to)879-882
Number of pages4
JournalMaterials Science Forum
Volume600-603
DOIs
Publication statusPublished - 2009
Externally publishedYes

Fingerprint

Ultrashort pulses
ripples
Laser beams
Wavelength
laser beams
wavelengths
lasers
Ultraviolet lasers
Periodic structures
ultraviolet lasers
Laser pulses
surface roughness
Surface roughness
spacing
Irradiation
Polarization
Infrared radiation
irradiation
Lasers
polarization

Keywords

  • Femtosecond laser
  • Micro-machining
  • Periodic structure
  • Ripple
  • Surface pattering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Tomita, T., Kumai, R., Kinoshita, K., Matsuo, S., Hashimto, S., Nagase, H., ... Suemoto, T. (2009). Femtosecond laser-induced surface patterning on 4H-SiC. Materials Science Forum, 600-603, 879-882. https://doi.org/10.4028/3-908453-11-9

Femtosecond laser-induced surface patterning on 4H-SiC. / Tomita, Takuro; Kumai, Ryota; Kinoshita, Keita; Matsuo, Shigeki; Hashimto, Shuichi; Nagase, Hirokazu; Nakajima, Makoto; Suemoto, Tohru.

In: Materials Science Forum, Vol. 600-603, 2009, p. 879-882.

Research output: Contribution to journalArticle

Tomita, T, Kumai, R, Kinoshita, K, Matsuo, S, Hashimto, S, Nagase, H, Nakajima, M & Suemoto, T 2009, 'Femtosecond laser-induced surface patterning on 4H-SiC', Materials Science Forum, vol. 600-603, pp. 879-882. https://doi.org/10.4028/3-908453-11-9
Tomita T, Kumai R, Kinoshita K, Matsuo S, Hashimto S, Nagase H et al. Femtosecond laser-induced surface patterning on 4H-SiC. Materials Science Forum. 2009;600-603:879-882. https://doi.org/10.4028/3-908453-11-9
Tomita, Takuro ; Kumai, Ryota ; Kinoshita, Keita ; Matsuo, Shigeki ; Hashimto, Shuichi ; Nagase, Hirokazu ; Nakajima, Makoto ; Suemoto, Tohru. / Femtosecond laser-induced surface patterning on 4H-SiC. In: Materials Science Forum. 2009 ; Vol. 600-603. pp. 879-882.
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