Femtosecond laser-induced surface patterning on 4H-SiC

Takuro Tomita, Ryota Kumai, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimto, Hirokazu Nagase, Makoto Nakajima, Tohru Suemoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Femtosecond laser-induced periodic structures, so-called "ripples", were systematically studied under various incident laser wavelengths and polarization properties. The effect of the excitation wavelength on the period of ripples was investigated from the infrared to ultraviolet laser pulses. The period of ripple on 4H-SiC correlated remarkably with the wavelength of the incident laser beam. This means that the period of ripples can be controlled by the wavelength of the laser beam. The irradiation of circular polarized femtosecond laser beam produced dot-like structures with the mean spacing of about 200 nm on the surface of 4H-SiC. The effect of initial surface roughness was also studied.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2007
EditorsTakashi Fuyuki, Hajime Okumura, Kenji Fukuda, Shin-ichi Nishizawa, Tsunenobu Kimoto, Akira Suzuki
PublisherTrans Tech Publications Ltd
Pages879-882
Number of pages4
ISBN (Print)9780878493579
Publication statusPublished - 2009 Jan 1
Event12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007 - Otsu, Japan
Duration: 2007 Oct 142007 Oct 19

Publication series

NameMaterials Science Forum
Volume600-603
ISSN (Print)0255-5476

Conference

Conference12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007
CountryJapan
CityOtsu
Period07/10/1407/10/19

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Keywords

  • Femtosecond laser
  • Micro-machining
  • Periodic structure
  • Ripple
  • Surface pattering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Tomita, T., Kumai, R., Kinoshita, K., Matsuo, S., Hashimto, S., Nagase, H., Nakajima, M., & Suemoto, T. (2009). Femtosecond laser-induced surface patterning on 4H-SiC. In T. Fuyuki, H. Okumura, K. Fukuda, S. Nishizawa, T. Kimoto, & A. Suzuki (Eds.), Silicon Carbide and Related Materials 2007 (pp. 879-882). (Materials Science Forum; Vol. 600-603). Trans Tech Publications Ltd.