Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Toshiaki Kondo; Shigeki Matsuo; Saulius Juodkazis; Hiroaki Misawa

doi:10.1063/1.1391232

Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Toshiaki Kondo, Shigeki Matsuo, Saulius Juodkazis, Hiroaki Misawa

Research output: Contribution to journal › Article › peer-review

295 Citations (Scopus)

Abstract

A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.

Original language	English
Pages (from-to)	725-727
Number of pages	3
Journal	Applied Physics Letters
Volume	79
Issue number	6
DOIs	https://doi.org/10.1063/1.1391232
Publication status	Published - 2001 Aug 6
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.",

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PY - 2001/8/6

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Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Abstract

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