Abstract
A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.
| Original language | English |
|---|---|
| Pages (from-to) | 725-727 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 79 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2001 Aug 6 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
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Kondo, T., Matsuo, S., Juodkazis, S., & Misawa, H. (2001). Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals. Applied Physics Letters, 79(6), 725-727. https://doi.org/10.1063/1.1391232