Abstract
A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.
| Original language | English |
|---|---|
| Pages (from-to) | 725-727 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 79 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2001 Aug 6 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals. / Kondo, Toshiaki; Matsuo, Shigeki; Juodkazis, Saulius; Misawa, Hiroaki.
In: Applied Physics Letters, Vol. 79, No. 6, 06.08.2001, p. 725-727.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals
AU - Kondo, Toshiaki
AU - Matsuo, Shigeki
AU - Juodkazis, Saulius
AU - Misawa, Hiroaki
PY - 2001/8/6
Y1 - 2001/8/6
N2 - A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.
AB - A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.
UR - http://www.scopus.com/inward/record.url?scp=0040374492&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0040374492&partnerID=8YFLogxK
U2 - 10.1063/1.1391232
DO - 10.1063/1.1391232
M3 - Article
VL - 79
SP - 725
EP - 727
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 6
ER -