Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Toshiaki Kondo, Shigeki Matsuo, Saulius Juodkazis, Hiroaki Misawa

Research output: Contribution to journalArticle

291 Citations (Scopus)

Abstract

A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.

Original languageEnglish
Pages (from-to)725-727
Number of pages3
JournalApplied Physics Letters
Volume79
Issue number6
DOIs
Publication statusPublished - 2001 Aug 6
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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