Femtosecond laser microfabrication of periodic structures using a microlens array

Shigeki Matsuo, S. Juodkazis, H. Misawa

Research output: Contribution to journalArticle

91 Citations (Scopus)

Abstract

A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

Original languageEnglish
Pages (from-to)683-685
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume80
Issue number4
DOIs
Publication statusPublished - 2005 Feb
Externally publishedYes

Fingerprint

Microfabrication
Periodic structures
Ultrashort pulses
Ablation
lasers
Laser beams
Lenses
Scanning
Fabrication
Glass
ablation
lenses
gratings
laser beams
fabrication
scanning
glass

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Femtosecond laser microfabrication of periodic structures using a microlens array. / Matsuo, Shigeki; Juodkazis, S.; Misawa, H.

In: Applied Physics A: Materials Science and Processing, Vol. 80, No. 4, 02.2005, p. 683-685.

Research output: Contribution to journalArticle

@article{18072315c401444ab73182db33322a50,
title = "Femtosecond laser microfabrication of periodic structures using a microlens array",
abstract = "A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.",
author = "Shigeki Matsuo and S. Juodkazis and H. Misawa",
year = "2005",
month = "2",
doi = "10.1007/s00339-004-3108-x",
language = "English",
volume = "80",
pages = "683--685",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Heidelberg",
number = "4",

}

TY - JOUR

T1 - Femtosecond laser microfabrication of periodic structures using a microlens array

AU - Matsuo, Shigeki

AU - Juodkazis, S.

AU - Misawa, H.

PY - 2005/2

Y1 - 2005/2

N2 - A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

AB - A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

UR - http://www.scopus.com/inward/record.url?scp=12344268687&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=12344268687&partnerID=8YFLogxK

U2 - 10.1007/s00339-004-3108-x

DO - 10.1007/s00339-004-3108-x

M3 - Article

AN - SCOPUS:12344268687

VL - 80

SP - 683

EP - 685

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 4

ER -