Fixation mechanisms of nanoparticles on substrates by electron beam irradiation

Daichi Morioka, Tomohiro Nose, Taiki Chikuta, Kazutaka Mitsuishi, Masayuki Shimojo

Research output: Research - peer-reviewArticle

Abstract

For applications such as the fabrication of plasmonic waveguides we developed a patterning technique to fabricate an array of nanoparticles on a substrate using focused electron beams (Noriki, T.; Abe, S.;.Kajikawa, K.; Shimojo, M. Beilstein J. Nanotechnol. 2015, 6, 1010-1015). This technique consists of three steps: Firstly, nanoparticles are placed over the entire surface of a substrate. Secondly, the nanoparticles are fixed on the substrate by focused electron beam irradiation. The electron beam decomposes the organic molecules located around the particle into amorphous carbon. The amorphous carbon immobilizes the particle on the substrate. Finally, the unfixed nanoparticles are removed. However, in this original technique, the area in which the nanoparticles were fixed was wider than the electron-probe size of a few nanometers. To understand this widening mechanisms, the effects of accelerating voltage, particle size and substrate material are investigated by means of both experiments and simulation. It is demonstrated that the fixing area is greatly affected by the electrons back-scattered by the substrate. The back-scattering leads to an increase in line width and thus reduces the resolution of this patterning technique.

LanguageEnglish
Pages1523-1529
Number of pages7
JournalBeilstein Journal of Nanotechnology
Volume8
Issue number1
DOIs
StatePublished - 2017

Fingerprint

Electron beams
Irradiation
Nanoparticles
Substrates
electron beams
nanoparticles
irradiation
Amorphous carbon
Electrons
carbon
Linewidth
Waveguides
Particle size
Scattering
Fabrication
Molecules
Electric potential
Experiments
electron probes
fixing

Keywords

  • Accelerating voltage
  • Electron beam
  • Gold
  • Monte Carlo simulation
  • Nanoparticle array

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)
  • Electrical and Electronic Engineering

Cite this

Fixation mechanisms of nanoparticles on substrates by electron beam irradiation. / Morioka, Daichi; Nose, Tomohiro; Chikuta, Taiki; Mitsuishi, Kazutaka; Shimojo, Masayuki.

In: Beilstein Journal of Nanotechnology, Vol. 8, No. 1, 2017, p. 1523-1529.

Research output: Research - peer-reviewArticle

Morioka, Daichi ; Nose, Tomohiro ; Chikuta, Taiki ; Mitsuishi, Kazutaka ; Shimojo, Masayuki. / Fixation mechanisms of nanoparticles on substrates by electron beam irradiation. In: Beilstein Journal of Nanotechnology. 2017 ; Vol. 8, No. 1. pp. 1523-1529
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