Abstract
Versatile micro fluidic device `Biochemical IC Family' based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 739-744 |
| Number of pages | 6 |
| Publication status | Published - 2000 |
| Externally published | Yes |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: 2000 Jan 23 → 2000 Jan 27 |
Other
| Other | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) |
|---|---|
| City | Miyazaki, Jpn |
| Period | 00/1/23 → 00/1/27 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family. / Ikuta, Koji; Hasegawa, Tadahiro; Adachi, Takao; Maruo, Shoji.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway, NJ, United States : IEEE, 2000. p. 739-744.Research output: Chapter in Book/Report/Conference proceeding › Chapter
}
TY - CHAP
T1 - Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family
AU - Ikuta, Koji
AU - Hasegawa, Tadahiro
AU - Adachi, Takao
AU - Maruo, Shoji
PY - 2000
Y1 - 2000
N2 - Versatile micro fluidic device `Biochemical IC Family' based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.
AB - Versatile micro fluidic device `Biochemical IC Family' based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.
UR - http://www.scopus.com/inward/record.url?scp=0033705945&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033705945&partnerID=8YFLogxK
M3 - Chapter
SP - 739
EP - 744
BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
PB - IEEE
CY - Piscataway, NJ, United States
ER -