Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi, Shoji Maruo

Research output: Chapter in Book/Report/Conference proceedingChapter

48 Citations (Scopus)

Abstract

Versatile micro fluidic device `Biochemical IC Family' based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages739-744
Number of pages6
Publication statusPublished - 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: 2000 Jan 232000 Jan 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Ikuta, K., Hasegawa, T., Adachi, T., & Maruo, S. (2000). Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 739-744). Piscataway, NJ, United States: IEEE.