Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -

K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, T.Adachi T.Adachi, S.Maruo S.Maruo, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)739-744
JournalThirteenth IEEE International Micro Electro Mechanical Systems Conference
Publication statusPublished - 2000 Jan 1

Cite this

@article{15945c87b3f5486ab235e61d52318b7b,
title = "Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -",
author = "K.Ikuta K.Ikuta and T.Hasegawa T.Hasegawa and T.Adachi T.Adachi and S.Maruo S.Maruo and Tadahiro Hasegawa",
year = "2000",
month = "1",
day = "1",
language = "English",
pages = "739--744",
journal = "Thirteenth IEEE International Micro Electro Mechanical Systems Conference",

}

TY - JOUR

T1 - Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -

AU - K.Ikuta, K.Ikuta

AU - T.Hasegawa, T.Hasegawa

AU - T.Adachi, T.Adachi

AU - S.Maruo, S.Maruo

AU - Hasegawa, Tadahiro

PY - 2000/1/1

Y1 - 2000/1/1

M3 - Article

SP - 739

EP - 744

JO - Thirteenth IEEE International Micro Electro Mechanical Systems Conference

JF - Thirteenth IEEE International Micro Electro Mechanical Systems Conference

ER -