Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -

K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, T.Adachi T.Adachi, S.Maruo S.Maruo, Tadahiro Hasegawa

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)739-744
JournalThirteenth IEEE International Micro Electro Mechanical Systems Conference
Publication statusPublished - 2000 Jan 1

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