Fluorinated Interlayer Dielectric Films in ULSI Multilevel Inter- connections

Research output: Contribution to journalArticle

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)49-59
JournalAmorphous Insulating Thin Films II., Simposia Proceedings
Volume46
Publication statusPublished - 1995 Jan 1

Cite this

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title = "Fluorinated Interlayer Dielectric Films in ULSI Multilevel Inter- connections",
author = "T. Homma",
year = "1995",
month = "1",
day = "1",
language = "English",
volume = "46",
pages = "49--59",
journal = "Amorphous Insulating Thin Films II., Simposia Proceedings",

}

TY - JOUR

T1 - Fluorinated Interlayer Dielectric Films in ULSI Multilevel Inter- connections

AU - Homma, T.

PY - 1995/1/1

Y1 - 1995/1/1

M3 - Article

VL - 46

SP - 49

EP - 59

JO - Amorphous Insulating Thin Films II., Simposia Proceedings

JF - Amorphous Insulating Thin Films II., Simposia Proceedings

ER -