Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections

Research output: Contribution to journalArticle

Original languageEnglish
JournalE-MRS Spring Meeting Abstracts(A-IV.1)
Publication statusPublished - 1994 May 24

Cite this

@article{b48a475ea92f40c48ae358e9b2fc5952,
title = "Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections",
author = "T. Homma",
year = "1994",
month = "5",
day = "24",
language = "English",
journal = "E-MRS Spring Meeting Abstracts(A-IV.1)",

}

TY - JOUR

T1 - Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections

AU - Homma, T.

PY - 1994/5/24

Y1 - 1994/5/24

M3 - Article

JO - E-MRS Spring Meeting Abstracts(A-IV.1)

JF - E-MRS Spring Meeting Abstracts(A-IV.1)

ER -