Formation and gas barrier properties of silica thin films formed on heat resistant PET (Polyethylene Terephthalate) substrate by excimer light irradiation to polysilazane coatings

Tomoji Ohishi, Kousei Ichikawa

Research output: Contribution to journalArticle


A solution of polysilazane (Perhydropolysilazane) was applied to a heat resistant PET substrate, and then irradiated with excimer light at 150 °C to form a gas barrier film. This film primarily consisted of a thin layer of SiO 2 , and had very high gas barrier properties, with a water vapor transmission rate of 0.02 g/m 2 ·day or less (40 °C/90% RH). This gas barrier film has good transparency, film adhesion, surface flatness, and flexibility, and since it has high heat resistance and good gas barrier performance, it is expected to have applications in films for flexible devices.

Original languageEnglish
Pages (from-to)143-146
Number of pages4
JournalMaterials Letters
Publication statusPublished - 2019 Jul 15



  • Excimer light irradiation
  • Flexible electronics
  • Gas barrier characteristics
  • Heat-resistant PET film
  • Polysilazane

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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